3DMAP, Tris(DiMethylAmido)Phosphine, (Me2N)3P, CAS# 1608-26-0
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon |