Tert-Butylimido,Tris(diMEthylamino)Tantalum, Ta[N(CH₃)₂]₃[=NC(CH₃)₃], TBTMET, TBTDMT, CAS# 69039-11-8

Your search for publications using this chemistry returned 7 record(s).

Number	Title
1	Low temperature Topographically Selective Deposition by Plasma Enhanced Atomic Layer Deposition with ion bombardment assistance
2	Topographical selective deposition: A comparison between plasma-enhanced atomic layer deposition/sputtering and plasma-enhanced atomic layer deposition/quasi-atomic layer etching approaches
3	Topographically selective deposition
4	Trilayer Tunnel Selectors for Memristor Memory Cells
5	Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure
6	Trilayer Tunnel Selectors for Memristor Memory Cells
7	Preliminary investigation of high-k materials - TiO₂ doped Ta₂O₅ films by remote plasma ALD

Tert-Butylimido,Tris(diMEthylamino)Tantalum, Ta[N(CH3)2]3[=NC(CH3)3], TBTMET, TBTDMT, CAS# 69039-11-8