AsH3, Arsine, CAS# 7784-42-1
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Atomic layer epitaxy of gallium arsenide with the use of atomic hydrogen |
Your search for publications using this chemistry returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Atomic layer epitaxy of gallium arsenide with the use of atomic hydrogen |