DMG, Dimethylgermane, Me2GeH2, CAS# 1449-64-5
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 3 record(s).
| Number | Title |
|---|---|
| 1 | Atomic hydrogen-assisted ALE of germanium |
| 2 | Atomic layer epitaxy of germanium |
| 3 | Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium |