Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Ar, Argon, CAS# 7440-37-1

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 51 record(s).

NumberTitle
1Effective work function tunability and interfacial reactions with underlying HfO2 layer of plasma-enhanced atomic layer deposited TaCxNy films
2Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects
3Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
4Enhanced interfacial reaction of precursor and low temperature substrate in HfO2 atomic layer deposition with highly Ar diluted O2 plasma
5Characteristics of Cobalt Films Deposited by Using a Remote Plasma ALD Method with a CpCo(CO)2 Precursor
6Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3
7Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
8Carbon content control of silicon oxycarbide film with methane containing plasma
9Growth of aluminum nitride thin films prepared by plasma-enhanced atomic layer deposition
10Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks
11AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing
12Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
13Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
14The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
15Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
16Atomic Layer Deposition of Nanolayered Carbon Films
17Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
18In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
19Impact of oxygen plasma postoxidation process on Al2O3/n-In0.53Ga0.47As metal-oxide-semiconductor capacitors
20Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
21Experimental and theoretical determination of the role of ions in atomic layer annealing
22Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
23A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
24Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
25Improved electrical performances of plasma-enhanced atomic layer deposited TaCxNy films by adopting Ar/H2 plasma
26Sub-nanometer heating depth of atomic layer annealing
27Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes
28Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon
29A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al2O3 on GaN based metal oxide semiconductor capacitor
30Plasma enhanced atomic layer deposition of aluminum sulfide thin films
31Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
32Comparison of thermal, plasma-enhanced and layer by layer Ar plasma treatment atomic layer deposition of Tin oxide thin films
33Hydrogen plasma enhanced oxide removal on GaSb planar and nanowire surfaces
34Plasma enhanced atomic layer deposition of zinc sulfide thin films
35Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
36Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells
37In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
38Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
39Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
40Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application
41Interface engineering of ALD HfO2-based RRAM with Ar plasma treatment for reliable and uniform switching behaviors
42Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements
43Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
44In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
45Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure
46AC-Capacitance Techniques for Interface Trap Analysis in GaN-Based Buried-Channel MIS-HEMTs
47Formation of aluminum nitride thin films as gate dielectrics on Si(100)
48Room temperature atomic layer deposition of TiO2 on gold nanoparticles
49Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
50Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition
51Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition