Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Ar, Argon, CAS# 7440-37-1

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 51 record(s).

NumberTitle
1Sub-nanometer heating depth of atomic layer annealing
2Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
3AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing
4Experimental and theoretical determination of the role of ions in atomic layer annealing
5Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
6Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon
7A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
8Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition
9Room temperature atomic layer deposition of TiO2 on gold nanoparticles
10Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
11Enhanced interfacial reaction of precursor and low temperature substrate in HfO2 atomic layer deposition with highly Ar diluted O2 plasma
12Formation of aluminum nitride thin films as gate dielectrics on Si(100)
13A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al2O3 on GaN based metal oxide semiconductor capacitor
14Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
15Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure
16Comparison of thermal, plasma-enhanced and layer by layer Ar plasma treatment atomic layer deposition of Tin oxide thin films
17Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3
18Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
19Carbon content control of silicon oxycarbide film with methane containing plasma
20Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks
21Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application
22Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
23Impact of oxygen plasma postoxidation process on Al2O3/n-In0.53Ga0.47As metal-oxide-semiconductor capacitors
24Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
25Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects
26Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
27Plasma enhanced atomic layer deposition of aluminum sulfide thin films
28The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
29Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
30Atomic Layer Deposition of Nanolayered Carbon Films
31Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition
32In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
33Hydrogen plasma enhanced oxide removal on GaSb planar and nanowire surfaces
34Plasma enhanced atomic layer deposition of zinc sulfide thin films
35Effective work function tunability and interfacial reactions with underlying HfO2 layer of plasma-enhanced atomic layer deposited TaCxNy films
36Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
37Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
38Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
39AC-Capacitance Techniques for Interface Trap Analysis in GaN-Based Buried-Channel MIS-HEMTs
40Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
41Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
42Interface engineering of ALD HfO2-based RRAM with Ar plasma treatment for reliable and uniform switching behaviors
43In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
44Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
45Improved electrical performances of plasma-enhanced atomic layer deposited TaCxNy films by adopting Ar/H2 plasma
46Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes
47Growth of aluminum nitride thin films prepared by plasma-enhanced atomic layer deposition
48Characteristics of Cobalt Films Deposited by Using a Remote Plasma ALD Method with a CpCo(CO)2 Precursor
49Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements
50In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
51Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells