dicarbonyl-bis(5-methyl-2,4-hexanediketonato) Ru(II) (C₁₆H₂₂O₆Ru), CAS# 0-0-0

Your search for publications using this chemistry returned 2 record(s).

Number	Title
1	Understanding the EOT-J_g degradation in Ru/SrTiO_x/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
2	Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH₃ Plasma as a Reactant

dicarbonyl-bis(5-methyl-2,4-hexanediketonato) Ru(II) (C16H22O6Ru), CAS# 0-0-0