Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

TASn, TetraAllylTin, (H2C=CHCH2)2Sn, CAS# 7393-43-3

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s).

NumberTitle
1Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization