CF₄, Tetrafluoromethane, Carbon Tetrafluoride, CAS# 75-73-0

Your search for publications using this chemistry returned 3 record(s).

Number	Title
1	Effects of Fluorine Plasma Treatment on the Electronic Structure of Plasma-Enhanced Atomic Layer Deposition HfO₂
2	Improvements on Interface Reliability and Capacitance Dispersion of Fluorinated ALD-Al₂O₃ Gate Dielectrics by CF₄ Plasma Treatment
3	Self-limiting diamond growth from alternating CF_x and H fluxes

CF4, Tetrafluoromethane, Carbon Tetrafluoride, CAS# 75-73-0