Ga(TMHD)3, Ga(THD)3, tris(2,2,6,6-tetramethyl- 3,5-heptanedionato) gallium, Gallium tetramethylheptanedionate, CAS# 34228-15-4
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Plasma enhanced atomic layer deposition of Ga2O3 thin films |