Bis(dimethylamino) [(methylaminodimethylsilyl) methylcyclopentadienyl] hafnium(IV), (DNSHf, Hf[η⁵:η¹-Cp(CH₂ ) (SiMe₂)NMe](NMe₂)₂, CAS# 0-0-0

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Number	Title
1	Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor

Bis(dimethylamino) [(methylaminodimethylsilyl) methylcyclopentadienyl] hafnium(IV), (DNSHf, Hf[η5:η1-Cp(CH2 ) (SiMe2)NMe](NMe2)2, CAS# 0-0-0