Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

DMZ, DiMethylZinc, ZnMe2, Zn(CH3)2, CAS# 544-97-8

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 6 record(s).

NumberTitle
1Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
2Radical Enhanced Atomic Layer Deposition of Metals and Oxides
3Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
4Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
5Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
6Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition