Pentamethyl cyclopentadienyl titanium trimethoxide Ti(CpMe₅)(OMe)₃, CAS# 123927-75-3

Your search for publications using this chemistry returned 11 record(s).

Number	Title
1	Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
2	Remote Plasma ALD of SrTiO₃ Using Cyclopentadienlyl-Based Ti and Sr Precursors
3	Crystallization Study by Transmission Electron Microscopy of SrTiO₃ Thin Films Prepared by Plasma-Assisted ALD
4	Growth of rutile-TiO₂ thin films via Sn doping and insertion of ultra-thin SnO₂ interlayer by atomic layer deposition
5	Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
6	Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD Sr_xTi_yO_z films
7	Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
8	Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
9	Growth of rutile-TiO₂ thin films via Sn doping and insertion of ultra-thin SnO₂ interlayer by atomic layer deposition
10	Plasma-Assisted Atomic Layer Deposition of SrTiO₃: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
11	Energy dissipation during pulsed switching of strontium-titanate based resistive switching memory devices

Pentamethyl cyclopentadienyl titanium trimethoxide Ti(CpMe5)(OMe)3, CAS# 123927-75-3