Abacus, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s).

Number	Title
1	PEALD of Copper using New Precursors for Next Generation of Interconnections
2	Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD
3	Copper-ALD Seed Layer as an Enabler for Device Scaling
4	Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD