Bis(cyclopentadienyl)ruthenium, Ruthenocene, Cp₂Ru, (C₅H₅)₂Ru, CAS# 1287-13-4

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 6 record(s).

Number	Title
1	Reactions of ruthenium cyclopentadienyl precursor in the metal precursor pulse of Ru atomic layer deposition
2	Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
3	Radical Enhanced Atomic Layer Deposition of Metals and Oxides
4	Radical Enhanced Atomic Layer Deposition of Metals and Oxides
5	Emerging Atomic Layer Deposition (ALD) Processes For Low Thermal Budget Flexible Electronics
6	Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode