(ethylcyclopentadienyl) (1, 5-cyclooctodiene) Iridium, Ir(EtCp)(COD), CAS# 0-0-0

Your search for publications using this chemistry returned 5 record(s).

Number	Title
1	TiO₂/Al₂O₃/TiO₂ Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
2	Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier
3	Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
4	Enhancement of the TiO₂ Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
5	Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer