Tetrakis (neopentyl) Titanium, ((CH₃)₃CCH₂)₄Ti, CAS# 36945-13-8

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 3 record(s).

Number	Title
1	Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material
2	Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material
3	Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization