Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Ir(acac)3, Iridium acetylacetonate, Iridium pentanedione, CAS# 15635-87-7

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s).

NumberTitle
1Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses
2Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates
3High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
4Systematic efficiency study of line-doubled zone plates