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2021 Year in Review




The publication database currently has 1628 entries.
Search from:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
90 Theses

Use Advanced Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)


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Recent Database Additions
Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
Search 1628 plasma ALD publications by:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics

Custom Hot-wire Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Hot-wire hardware returned 8 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic hydrogen-assisted ALE of germanium
2Atomic layer epitaxy of germanium
3Atomic layer epitaxy of Si using atomic H
4Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
5Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
6Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation
7Layer-by-layer epitaxial growth of GaN at low temperatures
8Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals

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