Custom Hot-wire Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Hot-wire hardware returned 12 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces
2Atomic hydrogen-assisted ALE of germanium
3Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
4Electron-enhanced atomic layer deposition of silicon thin films at room temperature
5Layer-by-layer epitaxial growth of GaN at low temperatures
6Atomic layer epitaxy of Si using atomic H
7Self-limiting diamond growth from alternating CFx and H fluxes
8Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals
9Atomic layer epitaxy of germanium
10Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
11Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
12Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation