Custom Hot-wire Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Hot-wire hardware returned 12 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
2Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation
3Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces
4Layer-by-layer epitaxial growth of GaN at low temperatures
5Self-limiting diamond growth from alternating CFx and H fluxes
6Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
7Atomic hydrogen-assisted ALE of germanium
8Atomic layer epitaxy of germanium
9Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
10Electron-enhanced atomic layer deposition of silicon thin films at room temperature
11Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals
12Atomic layer epitaxy of Si using atomic H