November 2022 Stats

The publication database currently has 1655 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5090 Authors

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2021 Year in Review

Recent Database Additions

Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films

Custom Hot-wire Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Hot-wire hardware returned 10 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic hydrogen-assisted ALE of germanium
2	Atomic layer epitaxy of germanium
3	Atomic layer epitaxy of Si using atomic H
4	Atomic structure of conducting nanofilaments in TiO₂ resistive switching memory
5	Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces
6	Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
7	Electron-enhanced atomic layer deposition of silicon thin films at room temperature
8	Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NH_x radical formation
9	Layer-by-layer epitaxial growth of GaN at low temperatures
10	Nucleation and growth of tantalum nitride atomic layer deposition on Al₂O₃ using TBTDET and hydrogen radicals