FHR-150-ALD Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications using FHR-150-ALD hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Development and characterization of an atmospheric pressure plasma reactor compatible with spatial ALD|
|2||Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films|