FHR-150-ALD Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications using FHR-150-ALD hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Development and characterization of an atmospheric pressure plasma reactor compatible with spatial ALD |
| 2 | Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films |