Angstrom-dep III PEALD Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Angstrom-dep III PEALD hardware returned 4 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
2Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
3PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
4Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application