Angstrom-dep III PEALD Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Angstrom-dep III PEALD hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity


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