Your search for plasma enhanced atomic layer deposition publications using Angstrom-dep III PEALD hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity |
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com
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