Quros 100 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Quros 100 hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
2Atomic Layer Deposition and Electrical Properties of SrTiO3 Thin Films Grown Using Sr(C11H19O2)2, Ti(Oi-C3H7)4, and H2O