Your search for plasma enhanced atomic layer deposition publications using Quros 100 hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition and Electrical Properties of SrTiO3 Thin Films Grown Using Sr(C11H19O2)2, Ti(Oi-C3H7)4, and H2O|
|2||Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma|
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