Your search for plasma enhanced atomic layer deposition publications using SNTEK Co. ALD 5008 hardware returned 3 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition|
|2||In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides|
|3||Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films|
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