SNTEK Co. ALD 5008 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using SNTEK Co. ALD 5008 hardware returned 5 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
2In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
3Very high frequency plasma reactant for atomic layer deposition
4Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
5Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition