ASM Pulsar 3000 Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications using ASM Pulsar 3000 hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Pyroelectric and Ferroelectric Properties of Hafnium Oxide Doped with Si via Plasma Enhanced ALD |
| 2 | Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing |