Your search for plasma enhanced atomic layer deposition publications using PEALD-200A, Jiaxing Kemicro Microelectronic hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Optical and electrical properties of Al:WS2 films prepared by atomic layer deposition and vulcanization|
|2||TiN/AlN Nano Multilayers Film Fabricated by Plasma Enhanced Atomic Layer Deposition|
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