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Joosung Engineering Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Joosung Engineering hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of oxidant source on the property of atomic layer deposited Al2O3 on hydrogen-terminated Si substrate

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Mark Sowa

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