Your search for plasma enhanced atomic layer deposition publications using Custom Spatial hardware returned 3 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources|
|2||Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors|
|3||Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier|
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