Custom Spatial Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Spatial hardware returned 3 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources
2Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
3Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier


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