Your search for plasma enhanced atomic layer deposition publications using Custom Spatial hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources|
|2||Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier|
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