Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources

Type:
Journal
Info:
Journal of Vacuum Science & Technology A 35, 01B117 (2017)
Date:
2016-11-16
DOI:
http://dx.doi.org/10.1116/1.4971173

Author Information

Name Institution
Sebastian FrankeTechnische Universität Braunschweig
Matthias BaumkötterTechnische Universität Braunschweig
Carsten MonkaTechnische Universität Braunschweig
Sebastian RaabeTechnische Universität Braunschweig
Reinhard CasparyTechnische Universität Braunschweig
Hans-Hermann JohannesTechnische Universität Braunschweig
Wolfgang KowalskyTechnische Universität Braunschweig
Sebastian BeckUniversity of Heidelberg
Annemarie PucciUniversity of Heidelberg
Hassan GargouriSentech Instruments GmbH

Films

Thermal Al2O3

Hardware used: Custom Spatial
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
H2O, Water
CAS#: 7732-18-5
Where to buy precursor
Deposition Temperature = 100C

Thermal Al2O3

Hardware used: Custom Spatial
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
O3, Ozone
CAS#: 10028-15-6
Deposition Temperature Range = 50-150C

Plasma Al2O3

Hardware used: Custom Spatial
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
He, Helium
CAS#: 7440-59-7
Deposition Temperature = 100C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Sopra GESP5

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: Sopra GESP5

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Empyrean

Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Diagnostic: Bruker Vertex 80V

Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Diagnostic: Custom

Characteristic: Plasma Species
Analysis: OES, Optical Emission Spectroscopy
Diagnostic: -

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Substrates

Si(100)

Notes

839