Helium, He, CAS# 7440-59-7

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources
2Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition
3Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
4Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
5Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition


Shortcuts



© 2014-2018 plasma-ald.com