Publication Information

Title:
Flexible Al2O3/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 38, 022418 (2020)
Date:
2020-02-03

Author Information

Name Institution
Sun Jung KimSungkyunkwan University
Sang Heon YongSungkyunkwan University
You Jin ChoiSungkyunkwan University
Hyeok HwangboSungkyunkwan University
Woo-Young YangSamsung Advanced Institute of Technology
Heeyeop ChaeSungkyunkwan University

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy

Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test

Substrates

PEN, Polyethylene Napthalate
Si(100)

Keywords

Diffusion Barrier

Notes

1460