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Flexible Al2O3/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 38, 022418 (2020)
Date:
2020-02-03
Author Information
| Name | Institution |
|---|---|
| Sun Jung Kim | Sungkyunkwan University |
| Sang Heon Yong | Sungkyunkwan University |
| You Jin Choi | Sungkyunkwan University |
| Hyeok Hwangbo | Sungkyunkwan University |
| Woo-Young Yang | Samsung Advanced Institute of Technology |
| Heeyeop Chae | Sungkyunkwan University |
Films
Plasma Al2O3
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Substrates
| PEN, Polyethylene Napthalate |
| Si(100) |
Notes
| 1460 |