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Applied Materials TxZ chamber Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Applied Materials TxZ chamber hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1Approximation of PE-MOCVD to ALD for TiN Concerning Resistivity and Chemical Composition

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Mark Sowa


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