Search 1530 plasma ALD publications by:
Search 1530 plasma ALD publications by:
Custom Direct Inductively Coupled Plasma Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications using Custom Direct Inductively Coupled Plasma hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |