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Altatech AltaCVD Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Altatech AltaCVD hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

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1Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps

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Mark Sowa

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