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Lam ALTUS Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Lam ALTUS hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices

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Mark Sowa


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