ASM EmerALD Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using ASM EmerALD hardware returned 11 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
2Evaluation of plasma parameters on PEALD deposited TaCN
3Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
4Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C-V
5Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
6PEALD ZrO2 Films Deposition on TiN and Si Substrates
7Spectral analysis of sidewall roughness during resist-core self-aligned double patterning integration
8Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach
9Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications
10Tribological properties of thin films made by atomic layer deposition sliding against silicon
11ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium