myplas Plasma Electronic Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using myplas Plasma Electronic hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Tuning the Ge(Sn) Tunneling FET: Influence of Drain Doping, Short Channel, and Sn Content