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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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Veeco - Ultratech - Cambridge NanoTech Savannah Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Veeco - Ultratech - Cambridge NanoTech Savannah hardware returned 8 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
2Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer
3Hydrophilic/hydrophobic surface of Al2O3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC)
4Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
5A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
6Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
7Interrogation of Electrochemical Properties of Polymer Electrolyte Thin Films with Interdigitated Electrodes
8Plasma activation and atomic layer deposition of TiO2 on polypropylene membranes for improved performances of lithium-ion batteries