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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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Veeco - Ultratech - Cambridge NanoTech Savannah Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Veeco - Ultratech - Cambridge NanoTech Savannah hardware returned 8 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Hydrophilic/hydrophobic surface of Al2O3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC)
2Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
3A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
4Interrogation of Electrochemical Properties of Polymer Electrolyte Thin Films with Interdigitated Electrodes
5Plasma activation and atomic layer deposition of TiO2 on polypropylene membranes for improved performances of lithium-ion batteries
6Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
7Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
8Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer