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Ever-tek model Plus 100 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Ever-tek model Plus 100 hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

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1Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition

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