Custom Batch Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications using Custom Batch hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Challenges in spacer process development for leading-edge high-k metal gate technology |
2 | Properties of N-rich Silicon Nitride Film Deposited by Plasma-Enhanced Atomic Layer Deposition |