Applied Materials 300mm ALD Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Applied Materials 300mm ALD hardware returned 3 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD
2Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
3Development of a multianalyte optical sol-gel biosensor for medical diagnostic