The publication database currently has 1574 entries.
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196 Films Compositions
265 Precursors and Plasma Gases
76 Deposition Hardwares
243 Film and Plasma Characteristics
84 Theses
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HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition
Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
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Applied Materials 300mm ALD Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications using Applied Materials 300mm ALD hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Development of a multianalyte optical sol-gel biosensor for medical diagnostic |
| 2 | Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications |