Your search for plasma enhanced atomic layer deposition publications using Applied Materials 300mm ALD hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Development of a multianalyte optical sol-gel biosensor for medical diagnostic |
| 2 | Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications |
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