Search Plasma ALD Publication Database By...

Custom Remote Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Remote hardware returned 3 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of Cobalt Thin Films Deposited by Remote Plasma ALD Method with Dicobalt Octacarbonyl
2Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
3Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition

Follow @PlasmaALDGuy
Mark Sowa

Shortcuts



© 2014-2018 plasma-ald.com