FHR-300-ALD Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications using FHR-300-ALD hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition |
| 2 | In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films |