Growth of Bi2O3 Films by Thermal- and Plasma-Enhanced Atomic Layer Deposition Monitored with Real-Time Spectroscopic Ellipsometry for Photocatalytic Water Splitting

Type:
Journal
Info:
ACS Appl. Nano Mater. 2019, 2, 6277-6286
Date:
2019-10-02
DOI:
http://dx.doi.org/10.1021/acsanm.9b01261

Author Information

Name Institution
Matthias J. MüllerHelmholtz-Zentrum Berlin für Materialien und Energie GmbH
Kristina KomanderHelmholtz-Zentrum Berlin für Materialien und Energie GmbH
Christian HöhnHelmholtz-Zentrum Berlin für Materialien und Energie GmbH
Roel van de KrolHelmholtz-Zentrum Berlin für Materialien und Energie GmbH
Aafke C. BronnebergHelmholtz-Zentrum Berlin für Materialien und Energie GmbH

Films

Thermal Bi2O3

Hardware used: Picosun R200
Bi(TMHD)3, Bi(THD)3, tris(2,2,6,6-tetramethyl- 3,5-heptanedionato) bismuth, Bismuth dipivaloylmethanate
CAS#: 142617-53-6
Where to buy precursor
H2O, Water
CAS#: 7732-18-5
Deposition Temperature Range = 210-330C

Plasma Bi2O3

Hardware used: Picosun R200
Bi(TMHD)3, Bi(THD)3, tris(2,2,6,6-tetramethyl- 3,5-heptanedionato) bismuth, Bismuth dipivaloylmethanate
CAS#: 142617-53-6
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 270-330C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000X

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000X

Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000X

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Specs PHOIBOS 100

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: Philips CM12

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: Philips CM12

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: -

Substrates

Al2O3

Notes

See chapter 3 in on-line thesis.
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