Publication Information

Title: Corrosion barriers for silver-based telescope mirrors: comparative study of plasma-enhanced atomic layer deposition and reactive evaporation of aluminum oxide

Type: Journal

Info: Journal of Astronomical Telescopes, Instruments, and Systems 1(4), 044002 (2015)

Date: 2015-08-27

DOI: http://dx.doi.org/10.1117/1.JATIS.1.4.044002

Author Information

Name

Institution

University of California - Santa Cruz

University of California - Santa Cruz

University of California Observatories

Films

Deposition Temperature = 150C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Unknown

Refractive Index

Ellipsometry

Unknown

Reflectivity

Reflectometry

Varian-Cary 5000 spectrophotometer

Environmental Testing

Environmental Testing

Custom

Substrates

Al2O3

Ta2O5

Keywords

Notes

439



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