Corrosion barriers for silver-based telescope mirrors: comparative study of plasma-enhanced atomic layer deposition and reactive evaporation of aluminum oxide

Type:
Journal
Info:
Journal of Astronomical Telescopes, Instruments, and Systems 1(4), 044002 (2015)
Date:
2015-08-27
DOI:
http://dx.doi.org/10.1117/1.JATIS.1.4.044002

Author Information

Name Institution
David M. FryaufUniversity of California - Santa Cruz
Andrew C. PhillipsUniversity of California - Santa Cruz
Nobuhiko P. KobayashiUniversity of California Observatories

Films

Plasma Al2O3

Hardware used: Oxford Instruments FlexAL
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 150C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: -

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: -

Characteristic: Reflectivity
Analysis: Reflectometry
Diagnostic: Varian-Cary 5000 spectrophotometer

Characteristic: Environmental Testing
Analysis: Environmental Testing
Diagnostic: Custom

Substrates

Al2O3
Ta2O5

Notes

439