Publication Information

Title: Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films

Type: Journal

Info: ACS Appl. Mater. Interfaces, 2016, 8 (21), pp 13590-13600

Date: 2016-05-11

DOI: http://dx.doi.org/10.1021/acsami.6b02292

Author Information

Name

Institution

University of British Columbia

Delft University of Technology

Delft University of Technology

University of British Columbia

University of British Columbia

Films

Deposition Temperature = 100C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Unknown

Wetting Angle

Unknown

Unknown

Water Vapor Transmission Rate (WVTR)

Cup Method

Unknown

Water Vapor Permeability (WVP)

Cup Method

Unknown

Air Permeability

Gurley Method

Unknown

Morphology, Roughness, Topography

Profilometry

Wyko NT1100 Optical profilometer

Images

SEM, Scanning Electron Microscopy

Hitachi S-3000N-VP

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

Hitachi S-3000N-VP

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Leybold MAX200

Chemical Composition, Impurities

FTIR, Fourier Transform InfraRed spectroscopy

Thermo Nicolet AVATAAR 360

Substrates

Paper

Silicon

Keywords

Notes

787



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