Crystallinity, Crystal Structure, Grain Size, Atomic Structure Plasma Enhanced Atomic Layer Deposition Publications

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NumberTitle
1Investigating the interface characteristics of high-k ZrO2/SiO2 stacked gate insulator grown by plasma-enhanced atomic layer deposition for improving the performance of InSnZnO thin film transistors
2Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
3Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
4Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
5Plasma enhanced atomic layer deposition of aluminum sulfide thin films
6Fast PEALD ZnO Thin-Film Transistor Circuits
7Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films
8The Integration of Plasma Enhanced Atomic Layer Deposition (PEALD) of Tantalum- Based Thin Films for Copper Diffusion Barrier Applications
9Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
10Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
11Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
12Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
13Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source
14Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
15Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition
16Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
17Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
18Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
19Plasma-Enhanced Atomic Layer Deposition of p-Type Copper Oxide Semiconductors with Tunable Phase, Oxidation State, and Morphology
20Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors
21Densification of Thin Aluminum Oxide Films by Thermal Treatments
22Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
23Atomic layer deposition of metal-oxide thin films on cellulose fibers
24Nanocrystallite Seeding of Metastable Ferroelectric Phase Formation in Atomic Layer-Deposited Hafnia-Zirconia Alloys
25PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases
26Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
27Nitride memristors
28Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
29Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
30Thermal Stability of ALD HfO2 Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma
31Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
32Resistive switching properties of plasma enhanced-ALD La2O3 for novel nonvolatile memory application
33Characteristics of Thin Hf-Silicate Gate Dielectrics after Remote N2 and N2O Plasma Post-Treatments
34Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
35The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
36Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
37Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
38Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations
39Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
40Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
41Ion energy control during plasma-enhanced atomic layer deposition: enabling materials control and selective processing in the third dimension
42Photocatalytic Properties of Co3O4-Coated TiO2 Powders Prepared by Plasma-Enhanced Atomic Layer Deposition
43Atomic layer deposition of GaN at low temperatures
44A Bilayer Diffusion Barrier of ALD-Ru/ALD-TaCN for Direct Plating of Cu
45Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer
46Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications
47Pyroelectric and Ferroelectric Properties of Hafnium Oxide Doped with Si via Plasma Enhanced ALD
48Formation of Tantalum Carbide and Nitride Phases in Atomic Layer Deposition Using Hydrogen Plasma and tert-Butylimidotris( diethylamido)-tantalum (TBTDET), and its Effect on Material Properties
49Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
50Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
51Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
52Plasma-Assisted Atomic Layer Deposition of Palladium
53Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
54Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
55Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition
56Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
57Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition
58Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
59ALD-grown Ultrathin AlN Film for Passivation of AlGaN/GaN HEMTs
60Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
61Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
62Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
63Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
64Sub-7-nm textured ZrO2 with giant ferroelectricity
65GeSbTe deposition for the PRAM application
66A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition
67Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
68Low temperature plasma enhanced deposition of GaP films on Si substrate
69Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
70Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
71Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure
72Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
73Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
74Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
75Atomic Layer Deposition of HfO2 Thin Films on Ultrathin SiO2 Formed by Remote Plasma Oxidation
76Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method
77Characterization of HfOxNy thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas
78Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
79In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
80Ultraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition
81Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
82Oxygen migration in TiO2-based higher-k gate stacks
83Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
84Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
85Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition
86Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
87Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
88Characteristics of WNxCy films deposited using remote plasma atomic layer deposition with (MeCp)W(CO)2(NO) for Cu diffusion barrier
89Characteristics of Plasma-Enhanced Atomic-Layer Deposited (PEALD) SnO2 Thin Films
90Low sheet resistance titanium nitride films by low-temperature plasma-enhanced atomic layer deposition using design of experiments methodology
91Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
92Plasma-Enhanced ALD of Titanium-Silicon-Nitride Using TiCl4 , SiH4, and N2/H2/Ar Plasma
93Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
94Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
95Formation of aluminum nitride thin films as gate dielectrics on Si(100)
96Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
97Photoluminescence blue shift of indium phosphide nanowire networks with aluminum oxide coating
98Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
99Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors
100Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
101Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
102Gallium nitride thin films by microwave plasma-assisted ALD
103Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
104Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
105Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films
106Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
107Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition
108Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
109Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
110Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
111High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
112Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
113Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
114A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films
115P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
116Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
117Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate
118Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition
119Plasma-Enhanced Atomic Layer Deposition of Nickel Nanotubes with Low Resistivity and Coherent Magnetization Dynamics for 3D Spintronics
120Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
121A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition
122Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
123Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
124Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
125Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
126Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
127Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition
128Effect of Buffer Layer for HfO2 Gate Dielectrics Grown by Remote Plasma Atomic Layer Deposition
129Plasma-enhanced atomic layer deposition of vanadium nitride
130Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
131Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation
132Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications
133Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH3 Plasma
134Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
135Perspectives on future directions in III-N semiconductor research
136Atomic layer deposition of ferroelectric Hf0.5Zr0.5O2 on single-layer, CVD-grown graphene
137Characteristics of Cobalt Thin Films Deposited by Remote Plasma ALD Method with Dicobalt Octacarbonyl
138Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
139Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
140Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
141Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
142Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
143Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
144Growth characteristics and film properties of plasma-enhanced and thermal atomic-layer-deposited magnesium oxide thin films prepared using bis(ethylcyclopentadienyl)magnesium precursor
145Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
146Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
147Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
148Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO2 Thin Films via Atomic Layer Deposition
149From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
150Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices
151Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition
152Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects
153High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films
154Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases
155Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
156Electrodynamic response and local tunneling spectroscopy of strongly disordered superconducting TiN films
157Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity
158Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures
159Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
160Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
161Suppression of GeOx interfacial layer and enhancement of the electrical performance of the high-K gate stack by the atomic-layer-deposited AlN buffer layer on Ge metal-oxide-semiconductor devices
162Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
163Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
164A route to low temperature growth of single crystal GaN on sapphire
165Strongly Disordered TiN and NbTiN s-Wave Superconductors Probed by Microwave Electrodynamics
166The effects of layering in ferroelectric Si-doped HfO2 thin films
167Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
168Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
169Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
170Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
171PEALD AlN: controlling growth and film crystallinity
172Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization
173Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
174Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
175Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes
176Layer-by-layer epitaxial growth of GaN at low temperatures
177Atomic layer epitaxy of gallium arsenide with the use of atomic hydrogen
178Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
179α-Ga2O3 grown by low temperature atomic layer deposition on sapphire
180Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
181Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
182Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
183High-κ Dielectric on ReS2: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al2O3
184Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
185Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers
186Comparative study of ALD SiO2 thin films for optical applications
187Remote plasma-enhanced atomic layer deposition of metallic TiN films with low work function and high uniformity
188The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
189Atomic layer epitaxy of Si using atomic H
190Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
191Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
192Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
193Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
194Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
195Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
196Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
197Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
198Plasma-enhanced atomic layer deposition of titanium vanadium nitride
199Characteristics of Ti-Capped Co Films Deposited by a Remote Plasma ALD Method Using Cyclopentadienylcobalt Dicarbonyl
200Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD
201Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
202Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications
203Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition
204Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
205Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
206Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
207AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing
208Plasma enhanced atomic layer deposition of Co thin film on τ-MnAl for effective magnetic exchange coupling and enhanced energy products
209Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights
210Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
211Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
212Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
213Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
214Plasma-Enhanced Atomic Layer Deposition of Ni
215Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
216Epitaxially grown crystalline Al2O3 interlayer on β-Ga2O3 (010) and its suppressed interface state density
217Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition
218Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
219Thin film GaP for solar cell application
220Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
221Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
222Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
223Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
224Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
225Experimental and theoretical determination of the role of ions in atomic layer annealing
226Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries
227A comparative study on electrical characteristics of crystalline AlN thin films deposited by ICP and HCPA-sourced atomic layer deposition
228Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
229Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
230Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition
231In Situ Synchrotron X-Ray Diffraction Analysis of Phase Transformation in Epitaxial Metastable hcp Nickel Thin Films, Prepared via Plasma-Enhanced Atomic Layer Deposition
232Increment of dielectric properties of SrTiO3 thin films by SrO interlayer on Ru bottom electrodes
233Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
234New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
235Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices
236Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
237Sub-10-nm ferroelectric Gd-doped HfO2 layers
238Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia
239Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
240An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD
241Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
242Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
243Interface effect on dielectric constant of HfO2/Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition
244Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
245In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
246Plasma-enhanced atomic layer deposition of amorphous Ru-Si-N thin film as a diffusion barrier of direct plating of Cu
247Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
248Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
249Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
250Plasma enhanced atomic layer deposition of gallium sulfide thin films
251Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
252Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
253Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer
254The effect of atomic layer deposition temperature on switching properties of HfOx resistive RAM devices
255The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
256In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics
257Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
258Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
259HfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer
260Scaled, Ferroelectric Memristive Synapse for Back-End-of-Line Integration with Neuromorphic Hardware
261Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
262Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
263High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
264Remote Plasma Atomic Layer Deposition of HfO2 Thin Films Using the Alkoxide Precursor Hf(mp)4
265Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter
266Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
267Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
2683D structure evolution using metastable atomic layer deposition based on planar silver templates
269Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
270Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
271Top-down fabrication of fluorine-doped tin oxide nanopillar substrates for solar water splitting
272Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
273X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect
274Correlation between ferroelectricity and ferroelectric orthorhombic phase of HfxZr1-xO2 thin films using synchrotron x-ray analysis
275Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition
276Growth of Bi2O3 Films by Thermal- and Plasma-Enhanced Atomic Layer Deposition Monitored with Real-Time Spectroscopic Ellipsometry for Photocatalytic Water Splitting
277Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
278Atomic layer deposition of titanium nitride for quantum circuits
279The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
280Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
281Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH3 Plasma
282Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization
283Large-Scale Deposition and Growth Mechanism of Silver Nanoparticles by Plasma-Enhanced Atomic Layer Deposition
284Characteristics of Plasma-Enhanced Atomic Layer Deposited RuSiN as a Diffusion Barrier against Cu
285Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
286Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
287The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
288Enhancement of Electrical Characteristics and Reliability in Crystallized ZrO2 Gate Dielectrics Treated with In-Situ Atomic Layer Doping of Nitrogen
289Atomic layer deposition of InN using trimethylindium and ammonia plasma
290Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
291Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
292Growth of rutile-TiO2 thin films via Sn doping and insertion of ultra-thin SnO2 interlayer by atomic layer deposition
293Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
294WNx Film Prepared by Atomic Layer Deposition using F-Free BTBMW and NH3 Plasma Radical for ULSI Applications
295Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
296Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
297Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co
298Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
299Nitrogen-Doping of Bulk and Nanotubular TiO2 Photocatalysts by Plasma-Assisted Atomic Layer Deposition
300Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
301Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
302Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition
303Plasma-Enhanced Atomic Layer Deposition of AlN Epitaxial Thin Film for AlN/GaN Heterostructure TFTs
304Evaluation of plasma parameters on PEALD deposited TaCN
305Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition
306Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
307Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
308Low-Leakage Tetragonal ZrO2 (EOT < 1 nm) With In Situ Plasma Interfacial Passivation on Germanium
309Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
310Plasma-enhanced atomic layer deposition of Cu–Mn films with formation of a MnSixOy barrier layer
311Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition
312ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
313Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition
314Crystalline growth of AlN thin films by atomic layer deposition
315Plasma-Enhanced Atomic Layer Deposition of Zirconium Oxide Thin Films and Its Application to Solid Oxide Fuel Cells
316Electrical and structural properties of conductive nitride films grown by plasma enhanced atomic layer deposition with significant ion bombardment effect
317Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
318Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
319Plasma-Enhanced Atomic Layer Deposition of TaN Thin Films Using Tantalum-Pentafluoride and N2/H2/Ar Plasma
320Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)
321Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
322Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
323Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
324Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
325Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits
326Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition
327Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing
328Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films
329Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment
330Electron-enhanced atomic layer deposition of silicon thin films at room temperature
331Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors
332Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights
333Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
334Atomic Layer Deposition and Electrical Properties of SrTiO3 Thin Films Grown Using Sr(C11H19O2)2, Ti(Oi-C3H7)4, and H2O
335Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2
336TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
337Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties
338In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
339Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition
340Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment
341Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
342Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
343Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
344Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier
345Remote plasma atomic layer deposited Al2O3 4H-SiC MOS capacitor with remote H2 plasma passivation and post metallization annealing
346Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
347Integration of Electrochemically Deposited Cu with Plasma Enhanced Atomic Layer Deposition-Grown Cu Seed Layers
348Room-temperature and high-quality HfO2/SiO2 gate stacked film grown by neutral beam enhanced atomic layer deposition
349Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
350Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition
351Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity
352Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
353Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
354Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
355Enhanced electrochemical performance of surface-treated Li[Ni0.8Co0.1Mn0.1]O2 cathode material for lithium-ion batteries
356Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
357Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films
358Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride
359TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
360Antioxidation properties of Ti0.83Al0.17N prepared using plasma-enhanced atomic layer deposition
361In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
362Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
363Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
364Growth mechanism and electrical properties of tungsten films deposited by plasma-enhanced atomic layer deposition with chloride and metal organic precursors
365Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
366Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
367Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
368Plasma enhanced atomic layer deposition of Fe2O3 thin films
369Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
370PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
371Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
372Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
373Comparative study on interface and bulk charges in AlGaN/GaN metal-insulator-semiconductor heterostructures with Al2O3, AlN, and Al2O3/AlN laminated dielectrics
374Plasma enhanced atomic layer deposition of Ga2O3 thin films
375Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
376Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
377Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
378Phase Formation in the Tantalum Carbonitride Film Deposited with Atomic Layer Deposition Using Ammonia
379Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application
380ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies
381Plasma-enhanced atomic layer deposition of BaTiO3
382Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C
383Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition
384Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
385Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
386Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
387SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
388NiCO2O4@TiN Core-shell Electrodes through Conformal Atomic Layer Deposition for All-solid-state Supercapacitors
389Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
390In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
391Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
392The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
393Plasma-Assisted Atomic Layer Deposition of Conductive Hafnium Nitride Using Tetrakis(ethylmethylamino)hafnium for CMOS Gate Electrode Applications
394Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
395Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
396Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation
397Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material
398Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
399Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
400Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
401Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
402Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
403Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
404Plasma-assisted atomic layer deposition and post-annealing enhancement of low resistivity and oxygen-free nickel nano-films using nickelocene and ammonia precursors
405Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
406Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
407Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO3 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
408Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
409Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
410Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
411Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
412Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
413Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
414Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
415Tribological properties of thin films made by atomic layer deposition sliding against silicon
416The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
417High temperature phase transformation of tantalum nitride films deposited by plasma enhanced atomic layer deposition for gate electrode applications
418PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
419Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
420Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin Films
421Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
422Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure
423Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
424Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
425Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
426Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
427HfO2 Thin Film Deposited by Remote Plasma Atomic Layer Deposition Method
428Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries
429Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD
430Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
431Remote Plasma ALD of Platinum and Platinum Oxide Films
432Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
433Interface Properties of Nickel-silicide Films Deposited by Using Plasma-assisted Atomic Layer Deposition
434Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
435Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition
436Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition
437Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
438Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
439The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
440Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
441Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition
442ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium
443Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content
444Sub-0.5 nm Equivalent Oxide Thickness Scaling for Si-Doped Zr1-xHfxO2 Thin Film without Using Noble Metal Electrode
445Comparison of thermal, plasma-enhanced and layer by layer Ar plasma treatment atomic layer deposition of Tin oxide thin films
446A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
447AlN passivation by plasma-enhanced atomic layer deposition for GaN-based power switches and power amplifiers
448Fully CMOS-compatible titanium nitride nanoantennas
449Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
450The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling Atomic Layer Deposition of InN Films
451Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition
452Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
453Properties of AlN grown by plasma enhanced atomic layer deposition
454Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
455Structural and optical characterization of low-temperature ALD crystalline AlN
456Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
457Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
458A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
459Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
460Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
461Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
462TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
463Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition
464In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition
465Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition
466Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
467Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
468Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
469Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
470Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
471Barrier Characteristics of TaN Films Deposited by Using the Remote Plasma Enhanced Atomic Layer Deposition Method
472Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
473Epitaxial GaN using Ga(NMe2)3 and NH3 plasma by atomic layer deposition
474Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures
475Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
476Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
477Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition
478Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements
479Atomic Layer Deposition of the Conductive Delafossite PtCoO2
480Growth mechanism and diffusion barrier property of plasma-enhanced atomic layer deposition Ti-Si-N thin films
481Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds
482Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition
483Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
484Characterization of Ultrathin PEALD-Grown RuCo Films for Diffusion Barrier and Copper Direct-Plate Applications
485Ru thin film grown on TaN by plasma enhanced atomic layer deposition
486Characteristics of HfO2 thin films grown by plasma atomic layer deposition
487Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
488Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High Efficiency Precursor Design
489Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
490Direct epitaxial nanometer-thin InN of high structural quality on 4H-SiC by atomic layer deposition
491Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
492Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
493The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
494Plasma enhanced atomic layer deposition of zinc sulfide thin films
495A Microwave Driven PE-ALD for Ultrathin Al2O3/ZnO Synthesis over Perovskite Layer
496Room-Temperature Atomic Layer Deposition of Platinum
497Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
498RF Characterization of Novel Superconducting Materials and Multilayers
499Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
500Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
501Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
502Effect of Oxygen Source on the Various Properties of SnO2 Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
503Local Electronic Structures and Electrical Characteristics of Well-Controlled Nitrogen-Doped ZnO Thin Films Prepared by Remote Plasma In situ Atomic Layer Doping
504Texture of atomic layer deposited ruthenium
505Growth and characterization of aluminum oxide films by plasma-assisted atomic layer deposition
506A comparative study of AlN and Al2O3 based gate stacks grown by atomic layer deposition on InGaAs
507Sub-nanometer heating depth of atomic layer annealing
508Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD
509Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
510Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
511Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing
512Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
513Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
514Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
515Controlling the composition of Ti1-xAlxN thin films by modifying the number of TiN and AlN subcycles in atomic layer deposition
516Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries
517Plasma-enhanced atomic layer deposition of nickel thin film using bis(1,4-diisopropyl-1,4-diazabutadiene)nickel
518Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
519Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
520Approximation of PE-MOCVD to ALD for TiN Concerning Resistivity and Chemical Composition
521Interface engineering of ALD HfO2-based RRAM with Ar plasma treatment for reliable and uniform switching behaviors
522Plasma-Modified Atomic Layer Deposition
523Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
524The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
525Photoelectrochemical hydrogen production on silicon microwire arrays overlaid with ultrathin titanium nitride
526Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
527Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
528High-Reflective Coatings For Ground and Space Based Applications
529Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity
530Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
531Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
532Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition
533Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
534Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
535HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition
536Comparison of Co Films Deposited by Remote Plasma Atomic Layer Deposition Method with Cyclopentadienylcobalt Dicarbonyl [CpCo(CO)2] and Dicobalt Octacarbonyl [Co2(CO)8]
537Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer
538Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis
539Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
540Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
541Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition
542Atomic hydrogen-assisted ALE of germanium
543ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
544Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
545Growth of tantalum nitride film as a Cu diffusion barrier by plasma-enhanced atomic layer deposition from bis((2-(dimethylamino)ethyl)(methyl)amido)methyl(tert-butylimido)tantalum complex
546Atomic layer deposition of YMnO3 thin films
547Study on the characteristics of aluminum thin films prepared by atomic layer deposition
548Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure
549Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
550Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
551Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten
552Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
553Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
554Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant
555Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
556CeO2 Doping of Hf0.5Zr0.5O2 Thin Films for High Endurance Ferroelectric Memories
557Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
558TiN/AlN Nano Multilayers Film Fabricated by Plasma Enhanced Atomic Layer Deposition
559Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
560Microstructure analysis of plasma enhanced atomic layer deposition-grown mixed-phase RuTaN barrier for seedless copper electrodeposition
561Improvement of the thermal stability of nickel silicide using a ruthenium interlayer deposited via remote plasma atomic layer deposition
562Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD)
563Effect of annealing conditions on formation of SrRuO3 films by interfacial reaction of SrO/RuO2 bi-layer films
564Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition
565Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
566Trilayer Tunnel Selectors for Memristor Memory Cells
567Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
568Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
569Growth, physical and electrical characterization of nickel oxide thin films prepared by plasma-enhanced atomic layer deposition using nickelocene and oxygen precursors
570Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
571Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
572Plasma-enhanced atomic layer deposition of ruthenium metal on free-standing carbon nanotube forest for 3D flexible binder-less supercapacitor electrodes
573Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery
574Improvement of Capacitance Equivalent Thickness, Leakage Current, and Interfacial State Density Based on Crystallized High-K Dielectrics/Nitrided Buffer Layer Gate Stacks
575Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
576Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
577Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM
578Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma
579Plasma Enhanced Atomic Layer Deposition of Ru-Ta composite film as a Seed Layer for CVD Cu filling
580Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
581Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
582Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
583Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique
584Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
585Plasma-enhanced atomic layer deposition of superconducting niobium nitride
586Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
587Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
588Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
589Atomic layer deposition of WNx thin films using a F-free tungsten metal-organic precursor and NH3 plasma as a Cu-diffusion barrier
590Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
591Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
592Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4
593Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
594Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications
595Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
596Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
597Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
598Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
599Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
600High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition
601Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
602Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor