Morphology, Roughness, Topography Plasma Enhanced Atomic Layer Deposition Publications

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NumberTitle
1Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition
2Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
3Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
4Effects of Hydrogen Plasma Treatments on the Atomic Layer Deposition of Copper
5Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
6Biofilm prevention on cochlear implants
7Oxygen migration in TiO2-based higher-k gate stacks
8Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
9Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
10Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
11Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten
12Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices
13Growth characteristics and film properties of plasma-enhanced and thermal atomic-layer-deposited magnesium oxide thin films prepared using bis(ethylcyclopentadienyl)magnesium precursor
14Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
15Very high frequency plasma reactant for atomic layer deposition
16Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
17Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors
18Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
19Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
20MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
21Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
22Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
23Large-Scale Deposition and Growth Mechanism of Silver Nanoparticles by Plasma-Enhanced Atomic Layer Deposition
24Plasma-assisted atomic layer deposition and post-annealing enhancement of low resistivity and oxygen-free nickel nano-films using nickelocene and ammonia precursors
25Advances in the fabrication of graphene transistors on flexible substrates
26Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing
27Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
28Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
29Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition
30Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
31AlGaN/GaN MIS-HEMT gate structure improvement using Al2O3 deposited by plasma-enhanced ALD
32Enhanced interfacial reaction of precursor and low temperature substrate in HfO2 atomic layer deposition with highly Ar diluted O2 plasma
33Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films
34Effect of annealing conditions on formation of SrRuO3 films by interfacial reaction of SrO/RuO2 bi-layer films
35Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices
36Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications
37Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
38Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
39A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition
40Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
41Growth, physical and electrical characterization of nickel oxide thin films prepared by plasma-enhanced atomic layer deposition using nickelocene and oxygen precursors
42Electrodynamic response and local tunneling spectroscopy of strongly disordered superconducting TiN films
43Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
44A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
45Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
46Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
47Plasma enhanced atomic layer deposition of Co thin film on τ-MnAl for effective magnetic exchange coupling and enhanced energy products
48Sub-nanometer heating depth of atomic layer annealing
49Comparative study of ALD SiO2 thin films for optical applications
50Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
51Characteristics of the HfO2 Thin Films Grown by Remote Plasma Atomic Layer Deposition Method on the Plasma Oxidized Si Substrate
52Atomic layer deposition of GaN at low temperatures
53Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
54Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
55Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
56Degradation of the deposition blocking layer during area-selective plasma-enhanced atomic layer deposition of cobalt
57Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
58Remote plasma-enhanced atomic layer deposition of metallic TiN films with low work function and high uniformity
59Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
60Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
61Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
62Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si
63The Cut-Off Phenomenon Effect on ZrO2 Growth Using Remote Plasma-Enhanced Atomic Layer Deposition
64Plasma-Enhanced Atomic Layer Deposition of Tantalum Nitrides Using Hydrogen Radicals as a Reducing Agent
65Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
66Plasma-induced sub-10nm Au-SnO2-In2O3 heterostructures fabricated by atomic layer deposition for highly sensitive ethanol detection on ppm level
67Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma
68Top-down fabrication of fluorine-doped tin oxide nanopillar substrates for solar water splitting
69Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments
70Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
71Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
72Nanoscale Encapsulation of Hybrid Perovskites Using Hybrid Atomic Layer Deposition
73Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
74Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
75Layer-by-layer epitaxial growth of GaN at low temperatures
76Plasma-Assisted Atomic Layer Deposition of Palladium
77Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
78Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
79Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration
80Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
81Hydrogen plasma-enhanced atomic layer deposition of copper thin films
82Tuning size and coverage of Pd nanoparticles using atomic layer deposition
83Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
84Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
85ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium
86Comparisons of alumina barrier films deposited by thermal and plasma atomic layer deposition
87Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
88The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
89Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications
90Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
91Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings
92In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
93Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
94Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
95Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
96Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
97Interface engineering of ALD HfO2-based RRAM with Ar plasma treatment for reliable and uniform switching behaviors
98Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
99Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors
100Atomic Layer Deposition of Gold Metal
101TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD
102Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
103Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process
104Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
105Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
106Sub-7-nm textured ZrO2 with giant ferroelectricity
107Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
108Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations
109Investigation of hydrogen impurities in PE-ALD AlN thin films by IBA methods
110Topographical selective deposition: A comparison between plasma-enhanced atomic layer deposition/sputtering and plasma-enhanced atomic layer deposition/quasi-atomic layer etching approaches
111Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
112A route to low temperature growth of single crystal GaN on sapphire
113Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer
114Chemistry of SiNx thin film deposited by plasma-enhanced atomic layer deposition using di-isopropylaminosilane (DIPAS) and N2 plasma
115Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition
116Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
117Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
118Growth of aluminum nitride thin films prepared by plasma-enhanced atomic layer deposition
119Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter
120Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier
121Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries
122Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor
123Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
124Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
125ZrO2 Gate Dielectric Deposited by Plasma-Enhanced Atomic Layer Deposition Method
126Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
127The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
128Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
129Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
130Study on deposition of Al2O3 films by plasma-assisted atomic layer with different plasma sources
131Correlation between ferroelectricity and ferroelectric orthorhombic phase of HfxZr1-xO2 thin films using synchrotron x-ray analysis
132Tin Oxynitride Anodes by Atomic Layer Deposition for Solid-State Batteries
133Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas
134Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis
135Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
136Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure
137Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
138Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
139Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
140Origin of Ferroelectric Phase Stabilization via the Clamping Effect in Ferroelectric Hafnium Zirconium Oxide Thin Films
141Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
142Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition
143Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
144Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
145Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity
146Role of the (Ta/Nb)Ox/Al2O3 interface on the flatband voltage shift for Al2O3/(Ta/Nb)Ox/Al2O3 multilayer charge trap capacitors
147Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
148Low-energy high-flux ion bombardment-induced interfacial mixing during Al2O3 plasma-enhanced atomic layer deposition
149Plasma enhanced atomic layer deposition of zinc sulfide thin films
150Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
151Plasma-enhanced ALD system for SRF cavity
152Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects
153Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
154Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
155Effects of N2 RPN on the Structural and Electrical Characteristics of Remote Plasma Atomic Layer-Deposited HfO2 Films
156Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
157Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
158An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD
159Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier
160Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
161Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
162Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
163ZrO2-coated SiC nanowires prepared by plasma-enhanced atomic layer chemical vapor deposition
164A comparative study on electrical characteristics of crystalline AlN thin films deposited by ICP and HCPA-sourced atomic layer deposition
165Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin Films
166Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
167Effect of hydrogen plasma treatment on the passivation performance of TiOx on crystalline silicon prepared by atomic layer deposition
168Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
169Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
170Characteristics of Plasma-Enhanced Atomic-Layer Deposited (PEALD) SnO2 Thin Films
171Atomic layer deposited silicon dioxide films on nanomechanical silicon nitride resonators
172Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
173Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
174Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures
175Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
176Room-temperature and high-quality HfO2/SiO2 gate stacked film grown by neutral beam enhanced atomic layer deposition
177A Microwave Driven PE-ALD for Ultrathin Al2O3/ZnO Synthesis over Perovskite Layer
178Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
179Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
180Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma
181Atomic layer deposition of copper thin film and feasibility of deposition on inner walls of waveguides
182Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
183Properties of AlN grown by plasma enhanced atomic layer deposition
184Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
185Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
186Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
187Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
188Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures
189Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
190Hydrophilic/hydrophobic surface of Al2O3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC)
191Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
192The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
193Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniques
194Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
195Nucleation and growth characteristics of electroplated Cu on plasma enhanced atomic layer deposition-grown RuTaN direct plate barriers
196The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling Atomic Layer Deposition of InN Films
197Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
198Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
199Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
200Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
201Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
202Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
203Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3 gate dielectric thin films
204Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD
205Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
206Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
207Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
208Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC
209Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
210Low-temperature plasma-enhanced atomic layer deposition of tin oxide electron selective layers for highly efficient planar perovskite solar cells
211Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
212Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
213Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition
214In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
215High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition
216Plasma enhanced atomic layer deposition of Fe2O3 thin films
217Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes
218Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition
219Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice
220Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
221Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
222Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
223Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
224Influence of plasma-based in-situ surface cleaning procedures on HfO2/In0.53Ga0.47As gate stack properties
225Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
226Advanced thin gas barriers film incorporating alternating structure of PEALD-based Al2O3/organic-inorganic nanohybrid layers
227Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
228A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
229Improved electrical performances of plasma-enhanced atomic layer deposited TaCxNy films by adopting Ar/H2 plasma
230Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
231Atomic layer deposition of ferroelectric Hf0.5Zr0.5O2 on single-layer, CVD-grown graphene
232Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches
233Evaluation of plasma parameters on PEALD deposited TaCN
234Atomic Layer Deposition of the Solid Electrolyte LiPON
235Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
236Copper-ALD Seed Layer as an Enabler for Device Scaling
237Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
238Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition
239Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery
240Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
241Barrier Characteristics of TaN Films Deposited by Using the Remote Plasma Enhanced Atomic Layer Deposition Method
242Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
243Water Vapor Treatment of Low-Temperature Deposited SnO2 Electron Selective Layers for Efficient Flexible Perovskite Solar Cells
244Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
245From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
246Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films
247Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
248The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
249Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
250Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
251Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
252Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
253Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
254Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
255Plasma-Enhanced Atomic Layer Deposition of SrTa2O6 Thin Films Using Sr[Ta(OC2H5)5(OC2H4OCH3)]2 as Precursor
256Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
257Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
258Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
259Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
260Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
261Crystalline growth of AlN thin films by atomic layer deposition
262In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
263Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
264Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source
265SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
266Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
267Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
268Structural and optical characterization of low-temperature ALD crystalline AlN
269Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
270Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH3 Plasma
271Plasma-Enhanced Atomic Layer Deposition of p-Type Copper Oxide Semiconductors with Tunable Phase, Oxidation State, and Morphology
272Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
273Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
274Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition
275Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
276Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
277Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
278Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries
279Study on the characteristics of aluminum thin films prepared by atomic layer deposition
280A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
281Investigating the interface characteristics of high-k ZrO2/SiO2 stacked gate insulator grown by plasma-enhanced atomic layer deposition for improving the performance of InSnZnO thin film transistors
282Aluminum Oxide at the Monolayer Limit via Oxidant-Free Plasma-Assisted Atomic Layer Deposition on GaN
283Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition
284The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
285Plasma enhanced atomic layer deposition of Ga2O3 thin films
286Development of plasma-enhanced atomic layer deposition grown Ru-WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications
287Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
288Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition
289Atomic layer deposition of InN using trimethylindium and ammonia plasma
290Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition
291Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating
292Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
293Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing
294Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
295Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition
296Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films
297Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
298Nitrogen-Doping of Bulk and Nanotubular TiO2 Photocatalysts by Plasma-Assisted Atomic Layer Deposition
299Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
300Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
301Plasma-Enhanced Atomic Layer Deposition of Nickel Nanotubes with Low Resistivity and Coherent Magnetization Dynamics for 3D Spintronics
302Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
303Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition
304Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
305Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
306Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
307Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
308Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
309Remote Plasma ALD of Platinum and Platinum Oxide Films
310Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection
311Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2
312Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
313Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
314Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate
315Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
316Highly stable all-inorganic CsPbBr3 nanocrystals film encapsulated with alumina by plasma-enhanced atomic layer deposition
317Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
318Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
319Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
320Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
321Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
322Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
323Plasma-enhanced Atomic Layer Deposition of TaN Film and Its Resistance to Copper Diffusion
324Plasma-enhanced atomic layer deposition of BaTiO3
325Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance
326Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition
327XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films
328An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
329Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
330Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition
331In Situ Synchrotron X-Ray Diffraction Analysis of Phase Transformation in Epitaxial Metastable hcp Nickel Thin Films, Prepared via Plasma-Enhanced Atomic Layer Deposition
332Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
333Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
334Plasma enhanced atomic layer deposition of gallium sulfide thin films
335In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition
336Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
337Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
338Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition
339Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor
340Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer
341Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper
342Plasma enhanced atomic layer deposited silicon dioxide with divalent Si precursor [N,N'-tert-butyl-1,1-dimethylethylenediamine silylene]
343A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
344Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
345ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
346Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
347Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
348Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition
349Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
350Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
351Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application
352Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
353RF Characterization of Novel Superconducting Materials and Multilayers
354Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
355Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
356Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
357Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment
358WNx Film Prepared by Atomic Layer Deposition using F-Free BTBMW and NH3 Plasma Radical for ULSI Applications
359Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
360PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
361Low temperature plasma enhanced deposition of GaP films on Si substrate
362PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases
363Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
364Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition
365Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
366Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
367Plasma-enhanced atomic layer deposition of ruthenium metal on free-standing carbon nanotube forest for 3D flexible binder-less supercapacitor electrodes
368Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
369Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
370Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
371Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
372High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
373Plasma-Assisted Atomic Layer Deposition of High-Density Ni Nanoparticles for Amorphous In-Ga-Zn-O Thin Film Transistor Memory
374Plasma-Enhanced Atomic Layer Deposition of Zirconium Oxide Thin Films and Its Application to Solid Oxide Fuel Cells
375Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
376Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
377Self-assembled monolayers as a defect sealant of Al2O3 barrier layers grown by atomic layer deposition
378Photocatalytic Properties of Co3O4-Coated TiO2 Powders Prepared by Plasma-Enhanced Atomic Layer Deposition
379Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
380The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
381Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
382Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma
383Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
384Thin film GaP for solar cell application
385Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
386Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
387Densification of Thin Aluminum Oxide Films by Thermal Treatments
388Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method
389The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
390Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
391Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition
392Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al2O3 and Parylene C for Biomedical Implantable Devices
393(Invited) Characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 Capacitors
394Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
395Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics
396Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
397Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method
398Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition
399The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
400Optimization of Y2O3 dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells
401Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
402Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
403Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
404Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia
405Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3
406Remote plasma atomic layer deposited Al2O3 4H-SiC MOS capacitor with remote H2 plasma passivation and post metallization annealing
407Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
408Correlation between SiO2 growth rate and difference in electronegativity of metal-oxide underlayers for plasma enhanced atomic layer deposition using tris(dimethylamino)silane precursor
409Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties
410Integration of Electrochemically Deposited Cu with Plasma Enhanced Atomic Layer Deposition-Grown Cu Seed Layers
411Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
412The Applications of Ultra-Thin Nanofilm for Aerospace Advanced Manufacturing Technology
413Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
414Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
415New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
416Performance and retention characteristics of nanocrystalline Si floating gate memory with an Al2O3 tunnel layer fabricated by plasma-enhanced atomic layer deposition
417Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition
418Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
419Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
420Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
421Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition
422Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
423AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing
424Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
425Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors
426Atomic layer epitaxy of Si using atomic H
427PEALD grown high-k ZrO2 thin films on SiC group IV compound semiconductor
428Improved understanding of recombination at the Si/Al2O3 interface
429Plasma-enhanced atomic layer deposition of SiO2 for channel isolation of colloidal quantum dots phototransistors
430Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
431Atomic hydrogen-assisted ALE of germanium
432Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
433Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
434Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
435ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies
436Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
437Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
438A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition
439Nanoscopic structural rearrangements of the Cu-filament in conductive-bridge memories
440Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films
441Room-Temperature Atomic Layer Deposition of Platinum
442Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
443Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
444Growth of Bi2O3 Films by Thermal- and Plasma-Enhanced Atomic Layer Deposition Monitored with Real-Time Spectroscopic Ellipsometry for Photocatalytic Water Splitting
445Fast PEALD ZnO Thin-Film Transistor Circuits
446Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
447Breakdown and Protection of ALD Moisture Barrier Thin Films
448Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
449Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
450Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
451Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
452Improvement of the thermal stability of nickel silicide using a ruthenium interlayer deposited via remote plasma atomic layer deposition
453Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition
454Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition
455Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
456High-κ Dielectric on ReS2: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al2O3
457Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
458Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
459Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
460Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
461Flexible Al2O3/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process
462Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
463Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
464Microstructure analysis of plasma enhanced atomic layer deposition-grown mixed-phase RuTaN barrier for seedless copper electrodeposition
465Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
466Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition
467Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
468Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge(100) prepared by PEALD
469Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition
470Nanolaminated Al2O3/HfO2 dielectrics for silicon carbide based devices
471Effect of Oxygen Source on the Various Properties of SnO2 Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
472Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
473Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
474Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
475Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface
476Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
477High-Reflective Coatings For Ground and Space Based Applications
478Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
479Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
480Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
481Plasma-enhanced atomic layer deposition of Cu–Mn films with formation of a MnSixOy barrier layer
482Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
483Experimental and theoretical determination of the role of ions in atomic layer annealing
484Plasma activation and atomic layer deposition of TiO2 on polypropylene membranes for improved performances of lithium-ion batteries
485Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric
486Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
487Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects
488Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films