Morphology, Roughness, Topography Plasma Enhanced Atomic Layer Deposition Publications

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Number	Title
1	(Invited) Characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 Capacitors
2	A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
3	A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
4	A route to low temperature growth of single crystal GaN on sapphire
5	Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors
6	Advances in the fabrication of graphene transistors on flexible substrates
7	Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
8	Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
9	AlGaN/GaN MIS-HEMT gate structure improvement using Al2O3 deposited by plasma-enhanced ALD
10	Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
11	Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties
12	An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD
13	An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
14	Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
15	Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries
16	Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices
17	Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
18	Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
19	Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
20	Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia
21	Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma
22	Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier
23	Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
24	Atomic layer deposition of copper thin film and feasibility of deposition on inner walls of waveguides
25	Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
26	Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors
27	Atomic layer deposition of GaN at low temperatures
28	Atomic Layer Deposition of Gold Metal
29	Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
30	Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
31	Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
32	Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source
33	Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
34	Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
35	Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
36	Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
37	Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
38	Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
39	Atomic Layer Deposition of the Solid Electrolyte LiPON
40	Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
41	Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications
42	Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
43	Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
44	Barrier Characteristics of TaN Films Deposited by Using the Remote Plasma Enhanced Atomic Layer Deposition Method
45	Biofilm prevention on cochlear implants
46	Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
47	Breakdown and Protection of ALD Moisture Barrier Thin Films
48	Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition
49	Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
50	Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma
51	Characteristics of Plasma-Enhanced Atomic-Layer Deposited (PEALD) SnO2 Thin Films
52	Characteristics of the HfO2 Thin Films Grown by Remote Plasma Atomic Layer Deposition Method on the Plasma Oxidized Si Substrate
53	Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten
54	Characteristics of ZnO Thin Films by Means of Plasma Enhanced Atomic Layer Deposition
55	Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
56	Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
57	Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer
58	Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
59	Comparative study of ALD SiO2 thin films for optical applications
60	Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
61	Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
62	Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
63	Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
64	Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
65	Comparisons of alumina barrier films deposited by thermal and plasma atomic layer deposition
66	Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
67	Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
68	Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
69	Copper-ALD Seed Layer as an Enabler for Device Scaling
70	Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
71	Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
72	Crystalline growth of AlN thin films by atomic layer deposition
73	Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
74	Degradation of the deposition blocking layer during area-selective plasma-enhanced atomic layer deposition of cobalt
75	Densification of Thin Aluminum Oxide Films by Thermal Treatments
76	Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices
77	Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
78	Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
79	Development of plasma-enhanced atomic layer deposition grown Ru-WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications
80	Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
81	Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films
82	Effect of annealing conditions on formation of SrRuO3 films by interfacial reaction of SrO/RuO2 bi-layer films
83	Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
84	Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
85	Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing
86	Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
87	Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper
88	Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
89	Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
90	Effects of N2 RPN on the Structural and Electrical Characteristics of Remote Plasma Atomic Layer-Deposited HfO2 Films
91	Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
92	Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures
93	Effects of Hydrogen Plasma Treatments on the Atomic Layer Deposition of Copper
94	Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3 gate dielectric thin films
95	Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition
96	Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
97	Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
98	Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
99	Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
100	Electrodynamic response and local tunneling spectroscopy of strongly disordered superconducting TiN films
101	Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
102	Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films
103	Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
104	Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
105	Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
106	Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process
107	Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
108	Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
109	Evaluation of plasma parameters on PEALD deposited TaCN
110	Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
111	Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
112	Fast PEALD ZnO Thin-Film Transistor Circuits
113	Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
114	Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
115	Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
116	Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations
117	Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
118	Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
119	Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
120	Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
121	Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
122	Growth of aluminum nitride thin films prepared by plasma-enhanced atomic layer deposition
123	Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
124	Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method
125	High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
126	High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition
127	High-Reflective Coatings For Ground and Space Based Applications
128	High-κ Dielectric on ReS2: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al2O3
129	Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
130	Highly stable all-inorganic CsPbBr3 nanocrystals film encapsulated with alumina by plasma-enhanced atomic layer deposition
131	Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
132	Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
133	Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
134	Hydrogen plasma-enhanced atomic layer deposition of copper thin films
135	Hydrophilic/hydrophobic surface of Al2O3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC)
136	Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
137	Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors
138	Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches
139	Improved electrical performances of plasma-enhanced atomic layer deposited TaCxNy films by adopting Ar/H2 plasma
140	Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric
141	Improved understanding of recombination at the Si/Al2O3 interface
142	Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
143	Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
144	Improvement of the thermal stability of nickel silicide using a ruthenium interlayer deposited via remote plasma atomic layer deposition
145	Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
146	In Situ Synchrotron X-Ray Diffraction Analysis of Phase Transformation in Epitaxial Metastable hcp Nickel Thin Films, Prepared via Plasma-Enhanced Atomic Layer Deposition
147	In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
148	Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
149	Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
150	Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
151	Influence of plasma-based in-situ surface cleaning procedures on HfO2/In0.53Ga0.47As gate stack properties
152	Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
153	Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
154	Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
155	Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
156	Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
157	Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
158	Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method
159	Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
160	Integration of Electrochemically Deposited Cu with Plasma Enhanced Atomic Layer Deposition-Grown Cu Seed Layers
161	Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface
162	Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
163	Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
164	Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
165	Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al2O3 and Parylene C for Biomedical Implantable Devices
166	Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
167	Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
168	Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
169	Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
170	Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
171	Low temperature plasma enhanced deposition of GaP films on Si substrate
172	Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications
173	Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD
174	Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes
175	Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
176	Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
177	Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing
178	Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
179	Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
180	Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
181	Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
182	Low-temperature plasma-enhanced atomic layer deposition of tin oxide electron selective layers for highly efficient planar perovskite solar cells
183	Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
184	Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure
185	Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
186	Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si
187	Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
188	Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition
189	Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
190	Microstructure analysis of plasma enhanced atomic layer deposition-grown mixed-phase RuTaN barrier for seedless copper electrodeposition
191	Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
192	Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures
193	Nanoscopic structural rearrangements of the Cu-filament in conductive-bridge memories
194	Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC
195	New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
196	Nitrogen-Doping of Bulk and Nanotubular TiO2 Photocatalysts by Plasma-Assisted Atomic Layer Deposition
197	Nucleation and growth characteristics of electroplated Cu on plasma enhanced atomic layer deposition-grown RuTaN direct plate barriers
198	Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
199	Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
200	Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings
201	Oxygen migration in TiO2-based higher-k gate stacks
202	PEALD grown high-k ZrO2 thin films on SiC group IV compound semiconductor
203	PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases
204	PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
205	Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
206	Performance and retention characteristics of nanocrystalline Si floating gate memory with an Al2O3 tunnel layer fabricated by plasma-enhanced atomic layer deposition
207	Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
208	Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
209	Photocatalytic Properties of Co3O4-Coated TiO2 Powders Prepared by Plasma-Enhanced Atomic Layer Deposition
210	Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments
211	Plasma enhanced atomic layer deposition of Fe2O3 thin films
212	Plasma enhanced atomic layer deposition of Ga2O3 thin films
213	Plasma enhanced atomic layer deposition of gallium sulfide thin films
214	Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
215	Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
216	Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
217	Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects
218	Plasma enhanced atomic layer deposition of zinc sulfide thin films
219	Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
220	Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
221	Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
222	Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
223	Plasma-assisted atomic layer deposition and post-annealing enhancement of low resistivity and oxygen-free nickel nano-films using nickelocene and ammonia precursors
224	Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics
225	Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition
226	Plasma-Assisted Atomic Layer Deposition of High-Density Ni Nanoparticles for Amorphous In-Ga-Zn-O Thin Film Transistor Memory
227	Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
228	Plasma-Assisted Atomic Layer Deposition of Palladium
229	Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
230	Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
231	Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
232	Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
233	Plasma-enhanced ALD system for SRF cavity
234	Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating
235	Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
236	Plasma-enhanced atomic layer deposition of BaTiO3
237	Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor
238	Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
239	Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
240	Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
241	Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
242	Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
243	Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
244	Plasma-Enhanced Atomic Layer Deposition of SrTa2O6 Thin Films Using Sr[Ta(OC2H5)5(OC2H4OCH3)]2 as Precursor
245	Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin Films
246	Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas
247	Plasma-enhanced Atomic Layer Deposition of TaN Film and Its Resistance to Copper Diffusion
248	Plasma-Enhanced Atomic Layer Deposition of Tantalum Nitrides Using Hydrogen Radicals as a Reducing Agent
249	Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
250	Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
251	Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
252	Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
253	Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
254	Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition
255	Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
256	Properties of AlN grown by plasma enhanced atomic layer deposition
257	Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
258	Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
259	Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films
260	Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
261	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
262	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
263	Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
264	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
265	Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
266	Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
267	Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
268	Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration
269	Remote Plasma ALD of Platinum and Platinum Oxide Films
270	Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
271	Remote plasma atomic layer deposited Al2O3 4H-SiC MOS capacitor with remote H2 plasma passivation and post metallization annealing
272	Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
273	Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
274	Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH3 Plasma
275	Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
276	Role of the (Ta/Nb)Ox/Al2O3 interface on the flatband voltage shift for Al2O3/(Ta/Nb)Ox/Al2O3 multilayer charge trap capacitors
277	Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
278	Room-Temperature Atomic Layer Deposition of Platinum
279	Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
280	Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
281	Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
282	Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
283	Self-assembled monolayers as a defect sealant of Al2O3 barrier layers grown by atomic layer deposition
284	Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
285	Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
286	Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
287	SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
288	Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
289	Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition
290	Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge(100) prepared by PEALD
291	Structural and optical characterization of low-temperature ALD crystalline AlN
292	Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
293	Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
294	Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
295	Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
296	Study on the characteristics of aluminum thin films prepared by atomic layer deposition
297	Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
298	Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
299	Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition
300	Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
301	Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
302	The Cut-Off Phenomenon Effect on ZrO2 Growth Using Remote Plasma-Enhanced Atomic Layer Deposition
303	The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
304	The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
305	The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
306	The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
307	The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
308	The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
309	Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
310	Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery
311	Thin film GaP for solar cell application
312	Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
313	TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD
314	Top-down fabrication of fluorine-doped tin oxide nanopillar substrates for solar water splitting
315	Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects
316	Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
317	Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
318	Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
319	Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
320	Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
321	Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition
322	Very high frequency plasma reactant for atomic layer deposition
323	Water Vapor Treatment of Low-Temperature Deposited SnO2 Electron Selective Layers for Efficient Flexible Perovskite Solar Cells
324	WNx Film Prepared by Atomic Layer Deposition using F-Free BTBMW and NH3 Plasma Radical for ULSI Applications
325	ZrO2 Gate Dielectric Deposited by Plasma-Enhanced Atomic Layer Deposition Method
326	ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium
327	ZrO2-coated SiC nanowires prepared by plasma-enhanced atomic layer chemical vapor deposition

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