Morphology, Roughness, Topography Plasma Enhanced Atomic Layer Deposition Publications

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NumberTitle
1(Invited) Characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 Capacitors
2A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
3A comparative study on electrical characteristics of crystalline AlN thin films deposited by ICP and HCPA-sourced atomic layer deposition
4A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
5A route to low temperature growth of single crystal GaN on sapphire
6Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors
7Advances in the fabrication of graphene transistors on flexible substrates
8Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
9Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
10ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
11AlGaN/GaN MIS-HEMT gate structure improvement using Al2O3 deposited by plasma-enhanced ALD
12AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing
13Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
14Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties
15An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD
16An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
17Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
18Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries
19Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices
20Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
21Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
22Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
23Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
24Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia
25Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma
26Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier
27Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
28Atomic layer deposition of copper thin film and feasibility of deposition on inner walls of waveguides
29Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
30Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors
31Atomic layer deposition of GaN at low temperatures
32Atomic Layer Deposition of Gold Metal
33Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
34Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
35Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
36Atomic layer deposition of InN using trimethylindium and ammonia plasma
37Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source
38Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
39Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
40Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
41Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
42Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
43Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
44Atomic Layer Deposition of the Solid Electrolyte LiPON
45Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
46Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications
47Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
48Atomic layer epitaxy of Si using atomic H
49Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
50Barrier Characteristics of TaN Films Deposited by Using the Remote Plasma Enhanced Atomic Layer Deposition Method
51Biofilm prevention on cochlear implants
52Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
53Breakdown and Protection of ALD Moisture Barrier Thin Films
54Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition
55Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
56Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma
57Characteristics of Plasma-Enhanced Atomic-Layer Deposited (PEALD) SnO2 Thin Films
58Characteristics of the HfO2 Thin Films Grown by Remote Plasma Atomic Layer Deposition Method on the Plasma Oxidized Si Substrate
59Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten
60Characteristics of ZnO Thin Films by Means of Plasma Enhanced Atomic Layer Deposition
61Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
62Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
63Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer
64Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
65Comparative study of ALD SiO2 thin films for optical applications
66Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
67Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
68Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
69Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
70Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
71Comparisons of alumina barrier films deposited by thermal and plasma atomic layer deposition
72Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
73Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
74Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
75Copper-ALD Seed Layer as an Enabler for Device Scaling
76Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
77Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniques
78Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
79Crystalline growth of AlN thin films by atomic layer deposition
80Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
81Degradation of the deposition blocking layer during area-selective plasma-enhanced atomic layer deposition of cobalt
82Densification of Thin Aluminum Oxide Films by Thermal Treatments
83Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices
84Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
85Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
86Development of plasma-enhanced atomic layer deposition grown Ru-WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications
87Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
88Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films
89Effect of annealing conditions on formation of SrRuO3 films by interfacial reaction of SrO/RuO2 bi-layer films
90Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
91Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
92Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing
93Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
94Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper
95Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
96Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
97Effects of N2 RPN on the Structural and Electrical Characteristics of Remote Plasma Atomic Layer-Deposited HfO2 Films
98Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
99Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures
100Effects of Hydrogen Plasma Treatments on the Atomic Layer Deposition of Copper
101Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3 gate dielectric thin films
102Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition
103Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
104Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
105Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
106Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
107Electrodynamic response and local tunneling spectroscopy of strongly disordered superconducting TiN films
108Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
109Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films
110Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
111Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
112Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
113Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process
114Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
115Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
116Evaluation of plasma parameters on PEALD deposited TaCN
117Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
118Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
119Fast PEALD ZnO Thin-Film Transistor Circuits
120Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
121Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
122Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
123Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations
124Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
125Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
126Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
127Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
128Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
129Growth of aluminum nitride thin films prepared by plasma-enhanced atomic layer deposition
130Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
131Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition
132Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method
133High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
134High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition
135High-Reflective Coatings For Ground and Space Based Applications
136High-κ Dielectric on ReS2: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al2O3
137Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
138Highly stable all-inorganic CsPbBr3 nanocrystals film encapsulated with alumina by plasma-enhanced atomic layer deposition
139Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
140Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
141Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
142Hydrogen plasma-enhanced atomic layer deposition of copper thin films
143Hydrophilic/hydrophobic surface of Al2O3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC)
144Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
145Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors
146Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches
147Improved electrical performances of plasma-enhanced atomic layer deposited TaCxNy films by adopting Ar/H2 plasma
148Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric
149Improved understanding of recombination at the Si/Al2O3 interface
150Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
151Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
152Improvement of the thermal stability of nickel silicide using a ruthenium interlayer deposited via remote plasma atomic layer deposition
153Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
154In Situ Synchrotron X-Ray Diffraction Analysis of Phase Transformation in Epitaxial Metastable hcp Nickel Thin Films, Prepared via Plasma-Enhanced Atomic Layer Deposition
155In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
156Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
157Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
158Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
159Influence of plasma-based in-situ surface cleaning procedures on HfO2/In0.53Ga0.47As gate stack properties
160Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
161Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
162Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
163Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition
164Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
165Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
166Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
167Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
168Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method
169Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
170Integration of Electrochemically Deposited Cu with Plasma Enhanced Atomic Layer Deposition-Grown Cu Seed Layers
171Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface
172Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
173Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
174Layer-by-layer epitaxial growth of GaN at low temperatures
175Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
176Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al2O3 and Parylene C for Biomedical Implantable Devices
177Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
178Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
179Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
180Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
181Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
182Low temperature plasma enhanced deposition of GaP films on Si substrate
183Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications
184Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD
185Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes
186Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
187Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
188Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing
189Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
190Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
191Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
192Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
193Low-temperature plasma-enhanced atomic layer deposition of tin oxide electron selective layers for highly efficient planar perovskite solar cells
194Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
195Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure
196Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition
197Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
198Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si
199Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
200Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition
201Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
202Microstructure analysis of plasma enhanced atomic layer deposition-grown mixed-phase RuTaN barrier for seedless copper electrodeposition
203Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
204Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures
205Nanoscopic structural rearrangements of the Cu-filament in conductive-bridge memories
206Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC
207New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
208Nitrogen-Doping of Bulk and Nanotubular TiO2 Photocatalysts by Plasma-Assisted Atomic Layer Deposition
209Nucleation and growth characteristics of electroplated Cu on plasma enhanced atomic layer deposition-grown RuTaN direct plate barriers
210Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
211Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
212Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings
213Oxygen migration in TiO2-based higher-k gate stacks
214PEALD grown high-k ZrO2 thin films on SiC group IV compound semiconductor
215PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases
216PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
217Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
218Performance and retention characteristics of nanocrystalline Si floating gate memory with an Al2O3 tunnel layer fabricated by plasma-enhanced atomic layer deposition
219Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
220Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
221Photocatalytic Properties of Co3O4-Coated TiO2 Powders Prepared by Plasma-Enhanced Atomic Layer Deposition
222Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments
223Plasma enhanced atomic layer deposition of Fe2O3 thin films
224Plasma enhanced atomic layer deposition of Ga2O3 thin films
225Plasma enhanced atomic layer deposition of gallium sulfide thin films
226Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
227Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
228Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
229Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects
230Plasma enhanced atomic layer deposition of zinc sulfide thin films
231Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
232Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
233Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
234Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
235Plasma-assisted atomic layer deposition and post-annealing enhancement of low resistivity and oxygen-free nickel nano-films using nickelocene and ammonia precursors
236Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics
237Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition
238Plasma-Assisted Atomic Layer Deposition of High-Density Ni Nanoparticles for Amorphous In-Ga-Zn-O Thin Film Transistor Memory
239Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
240Plasma-Assisted Atomic Layer Deposition of Palladium
241Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
242Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
243Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
244Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
245Plasma-enhanced ALD system for SRF cavity
246Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating
247Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
248Plasma-enhanced atomic layer deposition of BaTiO3
249Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor
250Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
251Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
252Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
253Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
254Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
255Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
256Plasma-Enhanced Atomic Layer Deposition of SrTa2O6 Thin Films Using Sr[Ta(OC2H5)5(OC2H4OCH3)]2 as Precursor
257Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin Films
258Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas
259Plasma-enhanced Atomic Layer Deposition of TaN Film and Its Resistance to Copper Diffusion
260Plasma-Enhanced Atomic Layer Deposition of Tantalum Nitrides Using Hydrogen Radicals as a Reducing Agent
261Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
262Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
263Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
264Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
265Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
266Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition
267Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
268Properties of AlN grown by plasma enhanced atomic layer deposition
269Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
270Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
271Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films
272Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
273Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
274Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
275Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
276Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
277Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
278Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
279Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
280Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration
281Remote Plasma ALD of Platinum and Platinum Oxide Films
282Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
283Remote plasma atomic layer deposited Al2O3 4H-SiC MOS capacitor with remote H2 plasma passivation and post metallization annealing
284Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
285Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
286Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH3 Plasma
287Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
288Role of the (Ta/Nb)Ox/Al2O3 interface on the flatband voltage shift for Al2O3/(Ta/Nb)Ox/Al2O3 multilayer charge trap capacitors
289Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
290Room-Temperature Atomic Layer Deposition of Platinum
291Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
292Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
293Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
294Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
295Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
296Self-assembled monolayers as a defect sealant of Al2O3 barrier layers grown by atomic layer deposition
297Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
298Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
299Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
300SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
301Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
302Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition
303Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge(100) prepared by PEALD
304Structural and optical characterization of low-temperature ALD crystalline AlN
305Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
306Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
307Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
308Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
309Study on the characteristics of aluminum thin films prepared by atomic layer deposition
310Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
311Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
312Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition
313Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
314Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
315The Cut-Off Phenomenon Effect on ZrO2 Growth Using Remote Plasma-Enhanced Atomic Layer Deposition
316The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling Atomic Layer Deposition of InN Films
317The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
318The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
319The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
320The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
321The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
322The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
323The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
324Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
325Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery
326Thin film GaP for solar cell application
327Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
328TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD
329Top-down fabrication of fluorine-doped tin oxide nanopillar substrates for solar water splitting
330Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects
331Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
332Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
333Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
334Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
335Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
336Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition
337Very high frequency plasma reactant for atomic layer deposition
338Water Vapor Treatment of Low-Temperature Deposited SnO2 Electron Selective Layers for Efficient Flexible Perovskite Solar Cells
339WNx Film Prepared by Atomic Layer Deposition using F-Free BTBMW and NH3 Plasma Radical for ULSI Applications
340ZrO2 Gate Dielectric Deposited by Plasma-Enhanced Atomic Layer Deposition Method
341ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium
342ZrO2-coated SiC nanowires prepared by plasma-enhanced atomic layer chemical vapor deposition


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