Density Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Density returned 145 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films
2A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
3A route to low temperature growth of single crystal GaN on sapphire
4Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
5Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources
6Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
7Approximation of PE-MOCVD to ALD for TiN Concerning Resistivity and Chemical Composition
8Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
9Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
10Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization
11Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
12Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
13Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
14Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier
15Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
16Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
17Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
18Atomic layer deposition of InN using trimethylindium and ammonia plasma
19Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
20Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
21Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
22Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
23Atomic layer deposition of WNx thin films using a F-free tungsten metal-organic precursor and NH3 plasma as a Cu-diffusion barrier
24Breakdown and Protection of ALD Moisture Barrier Thin Films
25Characteristics of an Al2O3 Thin Film Deposited by a Plasma Enhanced Atomic Layer Deposition Method Using N2O Plasma
26Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
27Chemical Reaction Mechanism in the Atomic Layer Deposition of TaCxNy Films Using tert-Butylimidotris(diethylamido)tantalum
28Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
29Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
30Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
31Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
32Comparisons of alumina barrier films deposited by thermal and plasma atomic layer deposition
33Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
34Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
35Densification of Thin Aluminum Oxide Films by Thermal Treatments
36Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices
37Dielectric barrier characteristics of Si-rich silicon nitride films deposited by plasma enhanced atomic layer deposition
38Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
39Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
40Effective work function tunability and interfacial reactions with underlying HfO2 layer of plasma-enhanced atomic layer deposited TaCxNy films
41Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
42Energy transformation of plasmonic photocatalytic oxidation on 1D quantum well of platinum thin film
43Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration
44Evaluation of plasma parameters on PEALD deposited TaCN
45Evaluation of Stress Induced by Plasma Assisted ALD SiN Film
46Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
47GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
48Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
49Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
50Growth of tantalum nitride film as a Cu diffusion barrier by plasma-enhanced atomic layer deposition from bis((2-(dimethylamino)ethyl)(methyl)amido)methyl(tert-butylimido)tantalum complex
51High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films
52High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal-Organic Silicon Precursor and Oxygen Radical
53High-Reflective Coatings For Ground and Space Based Applications
54Hydrogen plasma-enhanced atomic layer deposition of copper thin films
55Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
56In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
57Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
58Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
59Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
60Investigating the TiN film quality and growth behavior for plasma-enhanced atomic layer deposition using TiCl4 and N2/H2/Ar radicals
61Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
62Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications
63Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
64Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
65Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
66Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
67Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
68Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
69Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
70Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si
71Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures
72Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
73Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
74PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
75PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
76Phase Formation in the Tantalum Carbonitride Film Deposited with Atomic Layer Deposition Using Ammonia
77Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH3 Plasma
78Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane
79Plasma Enhanced Atomic Layer Deposition of SiN:H Using N2 and Silane
80Plasma enhanced atomic layer deposition of SiNx:H and SiO2
81Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects
82Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
83Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
84Plasma-Assisted Atomic Layer Deposition of Conductive Hafnium Nitride Using Tetrakis(ethylmethylamino)hafnium for CMOS Gate Electrode Applications
85Plasma-Assisted Atomic Layer Deposition of Palladium
86Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
87Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
88Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
89Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)
90Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor
91Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
92Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
93Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
94Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
95Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
96Plasma-enhanced atomic layer deposition of superconducting niobium nitride
97Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin Films
98Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas
99Plasma-enhanced Atomic Layer Deposition of TaN Film and Its Resistance to Copper Diffusion
100Plasma-Enhanced Atomic Layer Deposition of TaN Thin Films Using Tantalum-Pentafluoride and N2/H2/Ar Plasma
101Plasma-Enhanced Atomic Layer Deposition of Tantalum Nitrides Using Hydrogen Radicals as a Reducing Agent
102Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
103Plasma-enhanced atomic layer deposition of titanium vanadium nitride
104Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
105Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
106Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
107Properties of AlN grown by plasma enhanced atomic layer deposition
108Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
109Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films
110Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
111Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
112Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
113Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
114Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
115Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition
116Remote Plasma ALD of Platinum and Platinum Oxide Films
117Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
118Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
119Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
120Room-Temperature Atomic Layer Deposition of Platinum
121Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
122Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
123Structural and optical characterization of low-temperature ALD crystalline AlN
124Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
125Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
126Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition
127Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
128Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
129Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte
130Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
131The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
132Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
133Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
134TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD
135Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
136Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
137Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition
138ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium


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