Conformality, Step Coverage Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Conformality, Step Coverage returned 107 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	A PEALD Tunnel Dielectric for Three-Dimensional Non-Volatile Charge-Trapping Technology
2	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
3	Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM
4	Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors
5	ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors
6	ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
7	An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD
8	Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization
9	Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects
10	Atomic layer deposition growth of a novel mixed-phase barrier for seedless copper electroplating applications
11	Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
12	Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia
13	Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma
14	Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
15	Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
16	Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
17	Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications
18	Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
19	Atomic layer deposition of WNx thin films using a F-free tungsten metal-organic precursor and NH3 plasma as a Cu-diffusion barrier
20	Barrier Characteristics of TaN Films Deposited by Using the Remote Plasma Enhanced Atomic Layer Deposition Method
21	Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes
22	Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition
23	Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma
24	Characteristics of TiN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Method
25	Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten
26	Characterization of Ultrathin PEALD-Grown RuCo Films for Diffusion Barrier and Copper Direct-Plate Applications
27	Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
28	Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors
29	Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
30	Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
31	Copper-ALD Seed Layer as an Enabler for Device Scaling
32	Development of plasma-enhanced atomic layer deposition grown Ru-WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications
33	Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
34	Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte
35	Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
36	Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD)
37	Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration
38	Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
39	Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
40	Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
41	High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
42	Highly Conductive HfNx Films Prepared by Plasma-Assisted Atomic Layer Deposition
43	Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
44	Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
45	Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation
46	Hydrogen plasma-enhanced atomic layer deposition of copper thin films
47	Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors
48	Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
49	In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential
50	Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
51	Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
52	Integration of Electrochemically Deposited Cu with Plasma Enhanced Atomic Layer Deposition-Grown Cu Seed Layers
53	Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization
54	Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
55	Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
56	Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes
57	Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
58	Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
59	Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
60	Microstructure analysis of plasma enhanced atomic layer deposition-grown mixed-phase RuTaN barrier for seedless copper electrodeposition
61	Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition
62	NiCO2O4@TiN Core-shell Electrodes through Conformal Atomic Layer Deposition for All-solid-state Supercapacitors
63	Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN
64	Plasma enhanced atomic layer deposition of aluminum sulfide thin films
65	Plasma enhanced atomic layer deposition of Ga2O3 thin films
66	Plasma enhanced atomic layer deposition of gallium sulfide thin films
67	Plasma enhanced atomic layer deposition of SiNx:H and SiO2
68	Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
69	Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4
70	Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects
71	Plasma enhanced atomic layer deposition of zinc sulfide thin films
72	Plasma Enhanced Atomic Layer Deposition on Powders
73	Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
74	Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
75	Plasma-assisted atomic layer deposition and post-annealing enhancement of low resistivity and oxygen-free nickel nano-films using nickelocene and ammonia precursors
76	Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
77	Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
78	Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
79	Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)
80	Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
81	Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
82	Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor
83	Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers
84	Plasma-Enhanced Atomic Layer Deposition of Tantalum Nitrides Using Hydrogen Radicals as a Reducing Agent
85	Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material
86	Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
87	Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition
88	Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films
89	Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
90	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
91	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
92	Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
93	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
94	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
95	Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
96	Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration
97	Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
98	Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
99	Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
100	Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
101	Study on the characteristics of aluminum thin films prepared by atomic layer deposition
102	The Integration of Plasma Enhanced Atomic Layer Deposition (PEALD) of Tantalum- Based Thin Films for Copper Diffusion Barrier Applications
103	Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
104	Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
105	Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
106	Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
107	Very high frequency plasma reactant for atomic layer deposition

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