1 | Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten |
2 | Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma |
3 | Study on the characteristics of aluminum thin films prepared by atomic layer deposition |
4 | Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu |
5 | Characteristics of TiN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Method |
6 | Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films |
7 | Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage |
8 | Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes |
9 | Copper-ALD Seed Layer as an Enabler for Device Scaling |
10 | Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes |
11 | Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures |
12 | Plasma enhanced atomic layer deposition of zinc sulfide thin films |
13 | Ion energy control during plasma-enhanced atomic layer deposition: enabling materials control and selective processing in the third dimension |
14 | Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient |
15 | Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices |
16 | Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films |
17 | Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN |
18 | Highly Conductive HfNx Films Prepared by Plasma-Assisted Atomic Layer Deposition |
19 | Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition |
20 | Very high frequency plasma reactant for atomic layer deposition |
21 | An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD |
22 | Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films |
23 | Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM |
24 | Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma |
25 | Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage |
26 | Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4 |
27 | Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN |
28 | Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition |
29 | Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration |
30 | Hydrogen plasma-enhanced atomic layer deposition of copper thin films |
31 | Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors |
32 | Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System |
33 | Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition |
34 | Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma |
35 | Topographically selective deposition |
36 | Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition |
37 | Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor |
38 | Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition |
39 | High wet-etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane |
40 | Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization |
41 | Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT) |
42 | Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition |
43 | Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry |
44 | Plasma-Enhanced Atomic Layer Deposition of Nickel Nanotubes with Low Resistivity and Coherent Magnetization Dynamics for 3D Spintronics |
45 | Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies |
46 | Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors |
47 | A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects |
48 | Barrier Characteristics of TaN Films Deposited by Using the Remote Plasma Enhanced Atomic Layer Deposition Method |
49 | Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma |
50 | Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers |
51 | Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2 |
52 | Atomic layer deposition growth of a novel mixed-phase barrier for seedless copper electroplating applications |
53 | Atomic Layer Deposition of the Conductive Delafossite PtCoO2 |
54 | Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars |
55 | Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition |
56 | Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects |
57 | Boosting n-Type Doping Levels of Ge With Co-Doping by Integrating Plasma-Assisted Atomic Layer Deposition and Flash Annealing Process |
58 | Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage |
59 | Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries |
60 | Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties |
61 | Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality |
62 | Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects |
63 | Microstructure analysis of plasma enhanced atomic layer deposition-grown mixed-phase RuTaN barrier for seedless copper electrodeposition |
64 | Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications |
65 | Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O |
66 | ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors |
67 | Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte |
68 | Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD) |
69 | Integration of Electrochemically Deposited Cu with Plasma Enhanced Atomic Layer Deposition-Grown Cu Seed Layers |
70 | In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential |
71 | Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions |
72 | Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study |
73 | Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches |
74 | Plasma Enhanced Atomic Layer Deposition on Powders |
75 | Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications |
76 | Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition |
77 | Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films |
78 | Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma |
79 | Plasma-Assisted ALD of LiPO(N) for Solid State Batteries |
80 | Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors |
81 | NiCO2O4@TiN Core-shell Electrodes through Conformal Atomic Layer Deposition for All-solid-state Supercapacitors |
82 | Plasma enhanced atomic layer deposition of SiNx:H and SiO2 |
83 | Atomic layer deposition of WNx thin films using a F-free tungsten metal-organic precursor and NH3 plasma as a Cu-diffusion barrier |
84 | Selective composition modification deposition utilizing ion bombardment-induced interfacial mixing during plasma-enhanced atomic layer deposition |
85 | Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration |
86 | Plasma-assisted atomic layer deposition and post-annealing enhancement of low resistivity and oxygen-free nickel nano-films using nickelocene and ammonia precursors |
87 | Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications |
88 | Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma |
89 | Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies |
90 | The Integration of Plasma Enhanced Atomic Layer Deposition (PEALD) of Tantalum- Based Thin Films for Copper Diffusion Barrier Applications |
91 | Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride |
92 | Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2 |
93 | Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia |
94 | Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates |
95 | Radical Enhanced Atomic Layer Deposition of Titanium Dioxide |
96 | Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide |
97 | Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4 |
98 | Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection |
99 | Characterization of Ultrathin PEALD-Grown RuCo Films for Diffusion Barrier and Copper Direct-Plate Applications |
100 | Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth |
101 | Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment |
102 | Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications |
103 | Plasma enhanced atomic layer deposition of aluminum sulfide thin films |
104 | Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor |
105 | Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature |
106 | Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma |
107 | Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors |
108 | Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals |
109 | Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications |
110 | Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage |
111 | Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition |
112 | Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation |
113 | Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films |
114 | Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization |
115 | ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors |
116 | Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition |
117 | Plasma enhanced atomic layer deposition of gallium sulfide thin films |
118 | Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor |
119 | High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating |
120 | Plasma enhanced atomic layer deposition of Ga2O3 thin films |
121 | Development of plasma-enhanced atomic layer deposition grown Ru-WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications |
122 | Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes |
123 | Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD) |
124 | Plasma-Enhanced Atomic Layer Deposition of Tantalum Nitrides Using Hydrogen Radicals as a Reducing Agent |
125 | A PEALD Tunnel Dielectric for Three-Dimensional Non-Volatile Charge-Trapping Technology |
126 | Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma |
127 | Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material |
128 | Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films |
129 | Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors |