Capacitance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Capacitance returned 86 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	A comparative study of AlN and Al2O3 based gate stacks grown by atomic layer deposition on InGaAs
2	A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al2O3 on GaN based metal oxide semiconductor capacitor
3	Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces
4	ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors
5	ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
6	AlGaN/GaN MIS-HEMT gate structure improvement using Al2O3 deposited by plasma-enhanced ALD
7	AlGaN/GaN MIS-HEMTs With High Quality ALD-Al2O3 Gate Dielectric Using Water and Remote Oxygen Plasma As Oxidants
8	AlN passivation by plasma-enhanced atomic layer deposition for GaN-based power switches and power amplifiers
9	Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure
10	Capacitance characterization of GaP/n-Si structures grown by PE-ALD
11	Capacitance-voltage characterization of Al2O3/GaN-on-insulator (GaNOI) structures with TMAH surface treatment
12	Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method
13	Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
14	Characterization of HfOxNy thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas
15	Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
16	Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors
17	Comparative study on interface and bulk charges in AlGaN/GaN metal-insulator-semiconductor heterostructures with Al2O3, AlN, and Al2O3/AlN laminated dielectrics
18	Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
19	Damage free Ar ion plasma surface treatment on In0.53Ga0.47As-on-silicon metal-oxide-semiconductor device
20	Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure
21	Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
22	Effect of NH3 plasma passivation on the electrical characteristics of a nanolaminated ALD HfAlO on InGaAs MOS capacitor
23	Effect of Nitrogen Incorporation in HfO2 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
24	Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
25	Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition
26	Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures
27	Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
28	Electrical characteristics and step coverage of ZrO2 films deposited by atomic layer deposition for through-silicon via and metal-insulator-metal applications
29	Electrical Characteristics of n, p-In0.53Ga0.47As MOSCAPs With In Situ PEALD-AlN Interfacial Passivation Layer
30	Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
31	Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
32	Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
33	Enhanced non-volatile memory characteristics with quattro-layer graphene nanoplatelets vs. 2.85-nm Si nanoparticles with asymmetric Al2O3/HfO2 tunnel oxide
34	Epitaxially grown crystalline Al2O3 interlayer on β-Ga2O3 (010) and its suppressed interface state density
35	Fast PEALD ZnO Thin-Film Transistor Circuits
36	Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al2O3
37	Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
38	High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
39	High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
40	High quality HfO2/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness
41	High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
42	Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
43	Impact of AlN Interfacial Dipole on Effective Work Function of Ni and Band Alignment of Ni/HfO2/In0.53Ga0.47As Gate-Stack
44	Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
45	Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
46	Improvement of interfacial and electrical properties of Al2O3/n-Ga0.47In0.53As for III-V impact ionization MOSFETs
47	Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
48	In situ plasma enhanced atomic layer deposition half cycle study of Al2O3 on AlGaN/GaN high electron mobility transistors
49	In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
50	Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
51	Influence of PE-ALD of GaP on the Silicon Wafers Quality
52	Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films
53	Interfacial, Electrical, and Band Alignment Characteristics of HfO2/Ge Stacks with In Situ-Formed SiO2 Interlayer by Plasma-Enhanced Atomic Layer Deposition
54	Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition
55	Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
56	Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
57	Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
58	Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
59	MANOS performance dependence on ALD Al2O3 oxidation source
60	Nitride passivation of the interface between high-k dielectrics and SiGe
61	Oxygen migration in TiO2-based higher-k gate stacks
62	Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications
63	Performance and retention characteristics of nanocrystalline Si floating gate memory with an Al2O3 tunnel layer fabricated by plasma-enhanced atomic layer deposition
64	Performance enhancement of InAsSb QW-MOSFETs with in-situ H2 plasma cleaning for gate stack formation
65	Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments
66	Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors
67	Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
68	Plasma Enhanced Atomic Layer Deposition Passivated HfO2/AlN/In0.53Ga0.47As MOSCAPs With Sub-Nanometer Equivalent Oxide Thickness and Low Interface Trap Density
69	Plasma-Enhanced Atomic Layer Deposition of AlN Epitaxial Thin Film for AlN/GaN Heterostructure TFTs
70	Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor
71	Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
72	Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
73	Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
74	Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
75	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
76	Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen
77	Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
78	Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
79	Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
80	Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications
81	The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
82	The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces
83	Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
84	Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
85	Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors
86	ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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