www.plasma-ald.com September 2022 Statistics


Unique Visitors: 2504

Page Views: 14801


Top Viewed Publications

Rank Page Views
1 Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors 19
2 In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd 15
3 Radical Enhanced Atomic Layer Deposition of Metals and Oxides 14
4 Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells 12
5 Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures 11
6 Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition 11
7 Atomic layer deposition of GaN at low temperatures 10
8 Designing high performance precursors for atomic layer deposition of silicon oxide 9
9 In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3 9
10 A route to low temperature growth of single crystal GaN on sapphire 9
11 Atomic layer deposition of titanium nitride from TDMAT precursor 8
12 Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma 8
13 Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor 7
14 Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants 7
15 Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET 7
16 Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor 7
17 Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor 6
18 Comparative study of ALD SiO2 thin films for optical applications 6
19 TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD 6
20 Chemical Reaction Mechanism in the Atomic Layer Deposition of TaCxNy Films Using tert-Butylimidotris(diethylamido)tantalum 6
21 A fully integrated electronic platform for multiplexed intermolecular force spectroscopy 6
22 A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films 6
23 Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition 6
24 Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps 6
25 Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition 6


Top Chemistry Searches

Rank Page CAS# Views
1 BDEAS, SAM-24, Bis(diethylamino)silane, (Et2N)2SiH2 27804-64-4 97
2 Tris(dimethylamido)cyclopentadienyl Hafnium, HfCp(NMe2)3, Air Liquide HyALDTM 941596-80-1 68
3 Di(isopropylamino)Silane, (i-PrHN)2SiH2, DIPAS 908831-34-5 49
4 Tris(dimethylamino)cyclopentadienyl Zirconium, CpZr(NMe2)3, Air Liquide ZyALDTM 33271-88-4 37
5 TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3 75-24-1 33
6 VTIP, vanadium (V) tri-i-propoxy oxide, VO(O-i-Pr)3 5588-84-1 33
7 TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti 3275-24-9 30
8 TEMAHf, tetrakis(ethylmethylamido) Hafnium, hafnium ethylmethylamide, (EtMeN)4Hf 352535-01-4 29
9 PDMAT, (NMe2)5Ta, Pentakis (DiMethylAmido) Tantalum 19824-59-0 27
10 TDMASn, (Me2N)4Sn, [(CH3)2N]4Sn, Tetrakis(DiMethylAmido) Tin, Tin Dimethylamide 1066-77-9 26
11 Pentamethyl cyclopentadienyl titanium trimethoxide Ti(CpMe5)(OMe)3 123927-75-3 24
12 (ethylbenzyl) (1-ethyl-1,4-cyclohexadienyl) Ru(0), EBECHRu 0-0-0 24
13 di(sec-butylamino)silane (DSBAS), ((s-Bu)2N)SiH3 0-0-0 20
14 TDMAHf, tetrakis(dimethylamido)hafnium, hafnium dimethylamide, (Me2N)4Hf, also CAS# 19782-68-4 19962-11-9 18
15 TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4 546-68-9 16
16 Bis(EthylCycloPentadienyl)Ruthenium, Ru(EtCp)2 32992-96-4 16
17 BTBAS, bis(tert-butylamido) silane, (t-BuCNH)2SiH2 186598-40-3 15


Top Film Composition Searches

Rank Film Composition Views
1 GaN 26
2 SiO2 26
3 AlN 18
4 TiN 18
5 SiNx 15
6 TiO2 10
7 NbN 9
8 TaNx 8
9 TiAlN 8
10 Al2O3 8
11 Ta2O5 7
12 HfO2 7
13 SiC 6
14 Ni 6
15 Ga2O3 6