www.plasma-ald.com May 2022 Statistics



Top Viewed Publications

Rank Page Views
1 Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy 22
2 Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers 12
3 Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating 11
4 Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices 10
5 Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors 10


Top Chemistry Searches

Rank Page CAS# Views
1 BDEAS, SAM-24, Bis(diethylamino)silane, (Et2N)2SiH2 27804-64-4 63
2 TEMAHf, tetrakis(ethylmethylamido) Hafnium, hafnium ethylmethylamide, (EtMeN)4Hf 352535-01-4 36
3 TDMAHf, tetrakis(dimethylamido)hafnium, hafnium dimethylamide, (Me2N)4Hf, also CAS# 19782-68-4 19962-11-9 32
4 di(sec-butylamino)silane (DSBAS), ((s-Bu)2N)SiH3 0-0-0 28
5 TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti 3275-24-9 28


Top Film Composition Searches

Rank Film Composition Views
1 TiN 24
2 AlN 18
3 SiO2 12
4 SiNx 10
5 NbN 10


Top "Where to Buy" Chemistry Searches

Rank Page CAS# Views
1 TiCl4, Titanium Tetrachloride 7550-45-0 61
2 TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3 75-24-1 15
3 TDMAHf, tetrakis(dimethylamido)hafnium, hafnium dimethylamide, (Me2N)4Hf, also CAS# 19782-68-4 19962-11-9 12
4 B(OMe)3, Trimethyl borate, Boric acid trimethyl ester, Methyl borate 121-43-7 10
5 PDMAT, (NMe2)5Ta, Pentakis (DiMethylAmido) Tantalum 19824-59-0 10